Stress, mechanical and adhesion properties of multilayer tetrahedral amorphous carbon films

Applied Surface Science

Volumn 255, Issue 2, 2008, Pages 607-609

  Han, Xiao ^a   Zhu, Jiaqi ^a   Han, Jiecai ^a   Tan, Manlin ^a   Jia, Zecun ^a   Jiang, Chunzhu ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Amorphous materials; Gradient coatings; Mechanical properties; Residual stresses; Thin films

Indexed keywords

ADHESION; AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS MATERIALS; CARBON FILMS; ELASTIC MODULI; FILM PREPARATION; MECHANICAL PROPERTIES; MULTILAYERS; RESIDUAL STRESSES; THIN FILMS; VACUUM APPLICATIONS;

ADHESION PROPERTIES; CATHODIC VACUUM ARCS; CRITICAL SCRATCH LOAD; GRADIENT COATINGS; NANO-INDENTATION MEASUREMENTS; SCRATCHING RESISTANCE; TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS; TETRAHEDRAL AMORPHOUS CARBON FILMS;

MULTILAYER FILMS;

EID: 54349098936     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.06.087     Document Type: Article

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