Investigation of the interfacial reaction between metal and fluorine-contained polyimides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 862-868

  Yang, Ching Yu ^a   Chen, J S ^a   Hsu, S L C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BONDING; FLUORINE; METALLIC FILMS; METALLIZING; STRENGTH OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

ADHESION STRENGTH; DISRUPTION; INTERFACIAL REACTIONS; THIN METAL FILMS;

POLYIMIDES;

EID: 31044453968     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1868632     Document Type: Conference Paper

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