SCOPUS 정보 검색 플랫폼

Volumn 13, Issue 4-8, 2004, Pages 1385-1390

Ultra-thin tetrahedral amorphous carbon films with strong adhesion, as measured by nanoscratch testing

Author keywords

Adhesion; Critical load; Hardness; Internal stress

Indexed keywords

ADHESION; CATHODES; ENERGY DISPERSIVE SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

AMORPHOUS CARBON; SLOPE RATIO PROTOCOL; TOOLING COMPONENT;

DIAMONDS;

DIAMOND;

EID: 2442455503 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2003.11.025 Document Type: Article

Times cited : (26)

References (17)

1
- 0027662845
- 1 September
- Grill A. Wear 168 1-2 1 September 1993 143-153
- (1993) Wear , vol.168 , Issue.1-2 , pp. 143-153
- Grill, A.¹

2
- 0000720680
- Scharf T.W. Ott R.D. Yang D. Barnard J.A. J. Appl. Phys. 85 6 1999 3142
- (1999) J. Appl. Phys. , vol.85 , Issue.6 , pp. 3142
- Scharf, T.W.¹ Ott, R.D.² Yang, D.³ Barnard, J.A.⁴

3
- 0031245737
- Anders S. Callahan D.L. Pharr G.M. Tsui T.Y. Bhatia C.S. Surf. Coat. Technol. 94-95 1997 189
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 189
- Anders, S.¹ Callahan, D.L.² Pharr, G.M.³ Tsui, T.Y.⁴ Bhatia, C.S.⁵

4
- 0035881436
- Martin P.J. Bendavid A. Thin Solid Films 394 1-2 2001 1-14
- (2001) Thin Solid Films , vol.394 , Issue.1-2 , pp. 1-14
- Martin, P.J.¹ Bendavid, A.²

5
- 0031250779
- Shi X. Tay B.K. Flynn D.I. Ye Q. Sun Z. Surf. Coat. Technol. 94-95 1-3 1997 195-200
- (1997) Surf. Coat. Technol. , vol.94-95 , Issue.1-3 , pp. 195-200
- Shi, X.¹ Tay, B.K.² Flynn, D.I.³ Ye, Q.⁴ Sun, Z.⁵

6
- 0000243251
- P. Koidl, & P. Oelhafen (Eds.), : Plenum Press series B
- Catherine Y. Pastol A. Koidl P. Oelhafen P. Diamond and Diamond-Like Films and Coatings 266 1991 193-227 Plenum Press Nato ASI series B
- (1991) Diamond and Diamond-Like Films and Coatings , vol.266 , pp. 193-227
- Catherine, Y.¹ Pastol, A.²

7
- 0035269287
- Zhao J.F. Lemoine P. Liu Z.H. Quinn J.P. Maguire P. McLaughlin J.A. Diamond Relat. Mater. 10 2001 1070
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1070
- Zhao, J.F.¹ Lemoine, P.² Liu, Z.H.³ Quinn, J.P.⁴ Maguire, P.⁵ McLaughlin, J.A.⁶

8
- 0033377792
- Bhushan B. Diamond Relat. Mater. 8 1999 1985
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1985
- Bhushan, B.¹

9
- 0001449523
- Lemoine P. Lamberton R.W. Ogwu A.A. Zhao J.F. Maguire P. McLaughlin J. J. Appl. Phys. 86 11 1999 6564
- (1999) J. Appl. Phys. , vol.86 , Issue.11 , pp. 6564
- Lemoine, P.¹ Lamberton, R.W.² Ogwu, A.A.³ Zhao, J.F.⁴ Maguire, P.⁵ McLaughlin, J.⁶

10
- 0033480810
- Lemoine P. McLaughlin J. J. Vac. Sci. Technol. A. 17 1999 176
- (1999) J. Vac. Sci. Technol. A. , vol.17 , pp. 176
- Lemoine, P.¹ McLaughlin, J.²

11
- 0242603790
- 095
- Ferrari A.C. Robertson J. Phys. Rev. B. 61 2000 14 095
- (2000) Phys. Rev. B. , vol.61 , pp. 14
- Ferrari, A.C.¹ Robertson, J.²

12
- 0001510029
- Prawer S. Nugent K.W. Lifshitz Y. Lempert G.D. Grossman E. Kulik J.et al. Diamond Relat. Mater. 5 1996 433
- (1996) Diamond Relat. Mater. , vol.5 , pp. 433
- Prawer, S.¹ Nugent, K.W.² Lifshitz, Y.³ Lempert, G.D.⁴ Grossman, E.⁵ Kulik, J.⁶

13
- 0037437268
- Krishnan R. Kesavamoorthy R. Dash S. Tyagi A.K. Raj B. Scripta Mater. 48 2003 1099
- (2003) Scripta Mater. , vol.48 , pp. 1099
- Krishnan, R.¹ Kesavamoorthy, R.² Dash, S.³ Tyagi, A.K.⁴ Raj, B.⁵

14
- 0032608060
- Martinez E. Polo M.C. Pascual E. Esteve J. Diamond Relat. Mater. 8 1999 563
- (1999) Diamond Relat. Mater. , vol.8 , pp. 563
- Martinez, E.¹ Polo, M.C.² Pascual, E.³ Esteve, J.⁴

15
- 0032172789
- Li X. Bhushan B. Wear 220 1998 51
- (1998) Wear , vol.220 , pp. 51
- Li, X.¹ Bhushan, B.²

16
- 0035055604
- Lemoine P. Zhao J.F. Bell A. Maguire P. McLaughlin J. Diamond Relat. Mater. 10 2001 94
- (2001) Diamond Relat. Mater. , vol.10 , pp. 94
- Lemoine, P.¹ Zhao, J.F.² Bell, A.³ Maguire, P.⁴ McLaughlin, J.⁵

17
- 0031251110
- Park H.S. Kwon D. Thin Solid Films 307 1997 156
- (1997) Thin Solid Films , vol.307 , pp. 156
- Park, H.S.¹ Kwon, D.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.