SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 97, Issue , 2012, Pages 96-99

Scanning probe nanolithography on calixarene

(2) Kaestner, M a Rangelow, I W a

a ILMENAU UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

Calixarene; Molecular resist; Nanofabrication; Scanning probe lithography (SPL); STM lithography

Indexed keywords

AMBIENT CONDITIONS; CALIXARENES; CONSTANT-CURRENT; DIRECT-PATTERNING; FOWLER-NORDHEIM; MOLECULAR RESISTS; POSITIVE-TONE; PROCESS LATITUDES; PROXIMITY EFFECTS; RESORCINARENE; SCANNING PROBE LITHOGRAPHY; SCANNING PROBE NANO-LITHOGRAPHY; SCANNING PROBES; SILICON SUBSTRATES; STM-LITHOGRAPHY; TIP SPEED;

NANOTECHNOLOGY; RADIATION EFFECTS;

LITHOGRAPHY;

EID: 84865478470 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.05.042 Document Type: Article

Times cited : (33)

References (34)

1
- 37149024790
- B.Q. Wua, and A. Kumar J. Vac. Sci. Technol. B 25 2007 1743
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 1743
- Wua, B.Q.¹ Kumar, A.²

2
- 67651177764
- A.E. Grigorescu, and C.W. Hagen Nanotechnology 20 2009 292001
- (2009) Nanotechnology , vol.20 , pp. 292001
- Grigorescu, A.E.¹ Hagen, C.W.²

3
- 0004245602
- Semiconductor Industry Association (SIA)
- Semiconductor Industry Association (SIA), International Technology Roadmap for Semiconductors, Lithography (2009).
- (2009) International Technology Roadmap for Semiconductors, Lithography

4
- 0033116184
- K.K. Likharev P. IEEE 87 1999 606
- (1999) P. IEEE , vol.87 , pp. 606
- Likharev, K.K.¹

5
- 77953316283
- I.W. Rangelow Proc. SPIE - Int. Soc. Opt. Eng. 7637 2010 76370V
- (2010) Proc. SPIE - Int. Soc. Opt. Eng. , vol.7637
- Rangelow, I.W.¹

6
- 0012064449
- D.M. Eigler, and E.K. Schweizer Nature 344 1990 524
- (1990) Nature , vol.344 , pp. 524
- Eigler, D.M.¹ Schweizer, E.K.²

7
- 72549108942
- O. Custance Nat. Nanotechnol. 4 2009 803
- (2009) Nat. Nanotechnol. , vol.4 , pp. 803
- Custance, O.¹

8
- 34547579004
- R.V. Martinez Nano Lett. 7 2007 1846
- (2007) Nano Lett. , vol.7 , pp. 1846
- Martinez, R.V.¹

9
- 84865475779
- J.T. Yates Surf. Sci. 459 2000 L451
- (2000) Surf. Sci. , vol.459 , pp. 451
- Yates, J.T.¹

10
- 0000928428
- H.J. Mamin J. Vac. Sci. Technol. B 9 1991 1398
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 1398
- Mamin, H.J.¹

11
- 0033204218
- S. Xu Langmuir 15 1999 7244
- (1999) Langmuir , vol.15 , pp. 7244
- Xu, S.¹

12
- 0042265021
- S.F. Lyuksyutov Nature Mater. 2 2003 468
- (2003) Nature Mater. , vol.2 , pp. 468
- Lyuksyutov, S.F.¹

13
- 20444502580
- X.N. Xie Adv. Mater. 17 2005 1386
- (2005) Adv. Mater. , vol.17 , pp. 1386
- Xie, X.N.¹

14
- 70350624713
- O. Fenwick Nat. Nanotechnol. 4 2009 664
- (2009) Nat. Nanotechnol. , vol.4 , pp. 664
- Fenwick, O.¹

15
- 0342908968
- J.A. Dagata Appl. Phys. Lett. 56 1990 2001
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2001
- Dagata, J.A.¹

16
- 0000180640
- C.R.K. Marrian J. Vac. Sci. Technol. B 10 1992 2877
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 2877
- Marrian, C.R.K.¹

17
- 67651061886
- M.A. Walsh, and M.C. Hersam Annu. Rev. Phys. Chem. 60 2009 193
- (2009) Annu. Rev. Phys. Chem. , vol.60 , pp. 193
- Walsh, M.A.¹ Hersam, M.C.²

18
- 77952154268
- D. Pires Science 328 2010 732
- (2010) Science , vol.328 , pp. 732
- Pires, D.¹

19
- 21144446497
- C. Martin Nanotechnology 16 2005 1016
- (2005) Nanotechnology , vol.16 , pp. 1016
- Martin, C.¹

20
- 0031166840
- C. Lebreton, and Z.Z. Wang Surf. Sci. 382 1997 193
- (1997) Surf. Sci. , vol.382 , pp. 193
- Lebreton, C.¹ Wang, Z.Z.²

21
- 57249104981
- K. Ivanova J. Vac. Sci. Technol. B 26 2008 2367
- (2008) J. Vac. Sci. Technol. B , vol.26 , pp. 2367
- Ivanova, K.¹

22
- 33744459982
- C.K. Ober J. Mater. Chem. 16 2006 1693
- (2006) J. Mater. Chem. , vol.16 , pp. 1693
- Ober, C.K.¹

23
- 33746922334
- J.Y. Dai Chem. Mater. 18 2006 3404
- (2006) Chem. Mater. , vol.18 , pp. 3404
- Dai, J.Y.¹

24
- 34047113478
- H.H. Solak J. Vac. Sci. Technol. B 25 2007 91
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 91
- Solak, H.H.¹

25
- 33748280238
- A.P.G. Robinson Microelectron. Eng. 83 2006 1115
- (2006) Microelectron. Eng. , vol.83 , pp. 1115
- Robinson, A.P.G.¹

26
- 0030288283
- J. Fujita J. Vac. Sci. Technol. B 14 1996 4272
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4272
- Fujita, J.¹

27
- 0031070348
- Y. Ohnishi Microelectron. Eng. 35 1997 117
- (1997) Microelectron. Eng. , vol.35 , pp. 117
- Ohnishi, Y.¹

28
- 22644449772
- A. Tilke J. Vac. Sci. Technol. B 17 1999 1594
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 1594
- Tilke, A.¹

29
- 0031704825
- F.E. Prins Microelectron. Eng. 42 1998 359
- (1998) Microelectron. Eng. , vol.42 , pp. 359
- Prins, F.E.¹

30
- 0003404929
- C. D. Gutsche, Calixarenes Revisited (The Royal Society of Chemistry, 1998).
- (1998) Calixarenes Revisited (The Royal Society of Chemistry)
- Gutsche, C.D.¹

31
- 70349902958
- D.L. Olynick J. Polym. Sci., Part B: Polym. Phys. 47 2009 2091
- (2009) J. Polym. Sci., Part B: Polym. Phys. , vol.47 , pp. 2091
- Olynick, D.L.¹

32
- 84865528649
- M. Kaestner, I.W. Rangelow, J. Vac. Sci. Technol. B 29, 06FD02 (2011).
- (2011) J. Vac. Sci. Technol. B , vol.29
- Kaestner, M.¹ Rangelow, I.W.²

33
- 0030193348
- T.M. Mayer J. Vac. Sci. Technol. B 14 1996 2438
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 2438
- Mayer, T.M.¹

34
- 84865509404
- M. Kaestner, and I.W. Rangelow Proc. SPIE - Int. Soc. Opt. Eng. 8323 2012 83231G
- (2012) Proc. SPIE - Int. Soc. Opt. Eng. , vol.8323
- Kaestner, M.¹ Rangelow, I.W.²

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