Structure, phase stability and elastic properties in the Ti 1-xZr xN thin-film system: Experimental and computational studies

Acta Materialia

Volumn 60, Issue 15, 2012, Pages 5601-5614

  Abadias, G ^a   Ivashchenko, V I ^b   Belliard, L ^c   Djemia, Ph ^d  

^a CNRS   (France)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^c SORBONNE UNIVERSITÉ   (France)

^d UNIVERSITÉ PARIS 13   (France)

Author keywords

Ab initio calculations; Elastic properties; Structure; Thin films; Transition metal nitrides

Indexed keywords

AB INITIO CALCULATIONS; AS-GROWN; BRILLOUIN; COMPUTATIONAL STUDIES; CUBIC STRUCTURE; DC REACTIVE MAGNETRON SPUTTERING; ELASTIC PROPERTIES; FIRST-PRINCIPLES PSEUDOPOTENTIAL CALCULATION; FORMATION ENERGIES; HIGH TEMPERATURE; LINEAR INTERPOLATION; ORDERED STRUCTURES; PICOSECOND ULTRASONICS; PLASMA DISCHARGE; POISSON'S RATIO; POSITIVE VALUE; POST DEPOSITION ANNEALING; ROCK-SALT STRUCTURE; STRESS STATE; THERMAL-ANNEALING; TOTAL ENERGY; TRANSITION METAL NITRIDES; XRD; YOUNG'S MODULUS;

ACOUSTIC SPECTROSCOPY; ALLOYS; CALCULATIONS; DEPOSITION; ELASTIC CONSTANTS; ELASTIC MODULI; ELASTICITY; ELECTRIC DISCHARGES; FILM GROWTH; LATTICE CONSTANTS; MAGNETRONS; PHASE STABILITY; STRUCTURE (COMPOSITION); THIN FILMS; TITANIUM NITRIDE; TRANSITION METALS; VAPOR DEPOSITION; X RAY DIFFRACTION;

ZIRCONIUM;

EID: 84864924006     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2012.07.014     Document Type: Article

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