Determination of intrinsic stresses in textured and epitaxial TiN thin films deposited by dual ion beam sputtering

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 33-40

  Abadias, G ^a   Tse, Y Y ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Epitaxy; Ion beam sputtering; Residual stress; Texture; TiN

Indexed keywords

DEPOSITION; ION BEAMS; SILICON WAFERS; SINGLE CRYSTALS; SPUTTERING; STRAIN RATE; THERMAL STRESS; THIN FILMS; X RAY DIFFRACTION;

HYDROSTATIC STRESSES; INTRINSIC STRESSES;

TITANIUM NITRIDE;

SPUTTERING;

EID: 17044442560     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.137     Document Type: Article

References (23)

1. Sundgren J.E. Thin Solid Films 128 1985 21
2. Perry A.J. J. Vac. Sci. Technol. A 8 1990 1351
3. Rickerby D.S. J. Vac. Sci. Technol. A 4 1986 2809
4. Windischmann H. Crit. Rev. Solid State Mater. Sci. 17 1992 547
5. Pauleau Y. Nalwa H.S. Handbook of Thin Film Materials 1 2002 455 Academic Press ch. 9
6. Chun J.S. Petrov I. Greene J.E. J. Appl. Phys. 86 1999 3633
7. Williamson M.J. Dunn D.N. Hull R. Kodambaka S. Petrov I. Greene J.E. Appl. Phys. Lett. 78 2001 2223
8. Oh U.C. Je J.H. J. Appl. Phys. 74 1993 1692
9. Pelleg J. Zevin L.Z. Lungo S. Croitoru N. Thin Solid Films 197 1991 117
10. Li T.Q. Noda S. Oshawa T. Komiyama H. J. Vac. Sci. Technol. A 20 2002 583
11. Schell N. Matz W. Bottiger J. Chevallier J. Kringhoj P. J. Appl. Phys. 91 2002 2037
12. Noyan I.C. Cohen J.B. Residual Stress, Measurement by Diffraction and Interpretation 1987 Springer-Verlag New-York
13. Gergaud P. Labat S. Thomas O. Thin Solid Films 319 1998 9
14. Fillit R.Y. Perry A.J. Surf. Coat. Technol. 36 1988 647
15. Hauk V. Krug W.K. Oudelhoven R.W.M. Pintschovius P. Z. Metallkd. 79 1988 159
16. Abadias G. Tse Y.Y. Michel A. Jaouen C. Jaouen M. Thin Solid Films 433 2003 166
17. Carter G. Phys. Rev. B 62 2000 8376
18. Petrov I. Hultman L. Sundgren J.E. Greene J.E. J. Vac. Sci. Technol. A 10 1992 265
19. Hultman L. Barnett S.A. Sundgren J.E. Greene J.E. J. Cryst. Growth 92 1988 639
20. G. Abadias, Y.Y. Tse, to be published
21. Kamminga J.D. de Keijser Th.H. Delhez R. Mittemeijer E.J. J. Appl. Phys. 88 2000 6332
22. Ziegler J.F. Biersack J.P. Littmark U. The Stopping and Ranges of Ions in Solids 2000 Pergamon New-York SRIM 2000 computer code
23. Karetta F. Urbassek H.M. J. Appl. Phys. 71 1992 5410