Epitaxial Ti1-xWxN alloys grown on MgO(001) by ultrahigh vacuum reactive magnetron sputtering: Electronic properties and long-range cation ordering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 140-146

  Tian, F ^a   D'Arcy Gall, J ^a   Lee, T Y ^a   Sardela, M ^a   Gall, D ^a   Petrov, I ^a   Greene, J E ^a  

^a United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC PROPERTIES; EPITAXIAL GROWTH; FERMI LEVEL; LATTICE CONSTANTS; MAGNESIA; MAGNETRON SPUTTERING; POSITIVE IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

TITANIUM TUNGSTEN NITRIDE ALLOYS; VACUUM REACTIVE MAGNETRON SPUTTERING; VALENCE BAND;

TITANIUM ALLOYS;

EID: 0037273485     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1525818     Document Type: Article

References (44)

1. I. J. Raaijmakers, T. Setalvad, A. S. Bhansali, B. J. Burrow, L. Gutai, and K.-B. Kim, J. Electron. Mater. 19, 1221 (1990).
2. A. G. Dirks, R. A. M. Wolters, and A. J. M. Nellisen, Thin Solid Films 193/194, 201 (1990).
3. A. G. Dirks, R. A. M. Wolters, and A. E. M. De Veirman, Thin Solid Films 208, 181 (1992).
4. L. E. Toth, Transition Metal Carbides and Nitrides (Academic, New York, 1971), p. 97.
5. J. H. Moser, F. Tian, O. Haller, D. B. Bergstrom, I. Petrov, J. E. Greene, and C. Wiemer, Thin Solid Films 253, 445 (1994).
6. F. Adibi, I. Petrov, J. E. Greene, U. Wahlström, and J.-E. Sundgren, J. Vac. Sci. Technol. A 11, 136 (1993).
7. A. V. Phelps, J. Phys. Chem. Ref. Data 20, 557 (1991).
8. B. Chapman, Glow Discharge Processes (Wiley, New York, 1980), p. 108.
9. R. C. Powell, N.-E. Lee, Y.-W. Kim, and J. E. Greene, J. Appl. Phys. 73, 189 (1993).
10. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 9, 344 (1985).
11. I. Petrov, A. Myers, J. E. Greene, and J. R. Abelson, J. Vac. Sci. Technol. A 12, 2846 (1994).
12. J. F. Ziegler, J. P. Biersack, and U. Littmark, Stopping and Ranges of Ions in Solids (Pergamon, New York, 1985).
13. Inorganic index to powder diffraction file (Joint Committee on Powder Diffraction Standards, International Center for Powder Diffraction Data, Swarthmore, PA, 1997): TiN (card number 38-1420).
14. K. Aigner, W. Lengauer, D. Rafaja, and P. Ettmayer, J. Alloys Compd. 215, 121 (1994).
15. Numerical Data and Functional Relationships in Science and Technology, Landolt-Börnstein, New Series, Group III (Springer, Berlin, 1975), Vol. 7, Pt. B1, p. 27.
16. L. D. Madsen, R. Charavel, J. Birch, and E. B. Svedberg, J. Cryst. Growth 209, 91 (2000).
17. N.-E. Lee, G. Xue, and J. E. Greene, J. Appl. Phys. 80, 769 (1996).
18. N.-E. Lee, D. G. Cahill, and J. E. Greene, J. Appl. Phys. 80, 2199 (1996).
19. G. Xue, H. Z. Xiao, M.-A. Hasan, J. E. Greene, and H. K. Birnbaum, J. Appl. Phys. 74, 2512 (1993).
20. N.-E. Lee, G. A. Tomasch, and J. E. Greene, Appl. Phys. Lett. 65, 3236 (1994).
21. D. J. Eaglesham, H.-J. Gossmann, and M. Cerullo, Phys. Rev. Lett. 65, 1227 (1990).
22. J. A. Stroscio, D. T. Pierce, M. D. Stiles, A. Zangwill, and L. M. Sander, Phys. Rev. Lett. 75, 4246 (1995).
23. B. W. Karr, I. Petrov, D. G. Cahill, and J. E. Greene, Appl. Phys. Lett. 70, 1703 (1997).
24. B. W. Karr, I. Petrov, P. Desjardins, D. G. Cahill, and J. E. Greene, Surf. Coat. Technol. 94/95, 403 (1997).
25. D. Gall, I. Petrov, N. Hellgren, L. Hultman, J.-E. Sundgren, and J. E. Greene, J. Appl. Phys. 84, 6034 (1998).
26. D. Gall, I. Petrov, P. Desjardins, and J. E. Greene, J. Appl. Phys. 86, 5524 (1999).
27. C.-S. Shin, Y.-W. Kim, N. Hellgren, D. Gall, J. E. Greene, and I. Petrov, J. Vac. Sci. Technol. A 20, 2007 (2002).
28. D. Gall, C.-S. Shin, T. Spila, M. Odén, M. J. H. Senna, J. E. Greene, and I. Petrov, J. Appl. Phys. 91, 3589 (2002).
29. M. A. Krivoglaz and A. A. Smirnov, The Theory of Order-Disorder In Alloys (American Elsevier, New York, 1965).
30. The diffraction calculation program, "Diffract v. 1.2," was distributed by Virtual Laboratoy, Albuquerque, NM.
31. G. P. Srivastava, J. L. Martins, and A. Zunger, Phys. Rev. B 31, 2561 (1985).
32. J. F. Clark, F. J. Pinski, D. D. Johnson, P. A. Sterne, J. B. Staunton, and B. Ginatempo, Phys. Rev. Lett. 74, 3225 (1995).
33. L. I. Johansson, P. M. Stefan, M. L. Shek, and A. N. Christensen, Phys. Rev. B 22, 1032 (1980)
34. R. Sanjinés, C. Wiemer, J. Almeida, and F. Levy, Thin Solid Films 290-291, 334 (1996).
35. D. Gall, I. Petrov, and J. E. Greene, J. Appl. Phys. 89, 401 (2001).
36. J.-E. Sundgren, B. O. Johansson, A. Rockett, S. A. Barnett, and J. E. Greene, in Physics and Chemistry of Protective Coatings, edited by J. E. Greene, W. D. Sproul, and J. A. Thornton (AIP, New York, 1986), Series 149, p. 95.
37. B. W. Karr, D. G. Cahill, I. Petrov, and J. E. Greene, Phys. Rev. B 61, 16137 (2000).
38. R. Ahuja, O. Eriksson, J. M. Wills, and B. Johansson, Phys. Rev. B 53, 3072 (1996).
39. L. E. Toth, Transition Metal Carbides and Nitrides (Academic, New York, 1971), p. 219.
40. W. Spengler, R. Kaiser, A. N. Christensen, and G. Müller-Vogt, Phys. Rev. B 17, 1095 (1978).
41. N. Savvides and B. Window, J. Appl. Phys. 64, 225 (1988).
42. A. Bendavid, P. J. Martin, R. P. Netterfield, and T. J. Kinder, Surf. Coat. Technol. 70, 97 (1994).
43. F. Lefloch, C. Hoffman, and O. Desmolliens, Physica C 319, 258 (1999).
44. D. Gall, M. Stoehr, and J. E. Greene, Phys. Rev. B 64, 174302 (2001).