Structure, composition and microhardness of (Ti,Zr)N and (Ti,Al)N coatings prepared by DC magnetron sputtering

Materials Letters

Volumn 58, Issue 20, 2004, Pages 2553-2558

  Ramana, J V ^a   Kumar, Sanjiv ^a   David, Christopher ^a   Raju, V S ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Backscattering spectrometry; Magnetron sputtering; Microhardness; Ternary nitride; XRD

Indexed keywords

BACKSCATTERING; DEPOSITION; MAGNETRON SPUTTERING; METALLIC FILMS; MICROHARDNESS; SPECTROMETRY; TERNARY SYSTEMS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

ATOMIC COMPOSITION; BACKSCATTERING SPECTROMETRY; COSPUTTERING; TERNARY NITRIDES;

TITANIUM NITRIDE;

EID: 2942633597     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2004.03.020     Document Type: Article

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