SCOPUS 정보 검색 플랫폼

Volumn 100, Issue 25, 2012, Pages

Correlation between threshold voltage and channel dopant concentration in negative-type metal-oxide-semiconductor field-effect transistors studied by atom probe tomography

(14) Takamizawa, H a Shimizu, Y a Inoue, K a Toyama, T a Yano, F b Nishida, A c Mogami, T d Okada, N e Kato, M e Uchida, H e Kitamoto, K e,f Miyagi, T f Kato, J f Nagai, Y a

a TOHOKU UNIVERSITY (Japan)

b TOKYO CITY UNIVERSITY (Japan)

c RENESAS TECHNOLOGY CORP (Japan)

d NEC CORPORATION (Japan)

e TOSHIBA CORPORATION (Japan)

f TORAY RESEARCH CENTER INC (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

65-NM NODE; ATOM PROBE TOMOGRAPHY; BORON CONCENTRATIONS; DEVICE FAILURES; DOPANT CONCENTRATIONS; METAL-OXIDE; METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR; SEMICONDUCTOR FIELD-EFFECT TRANSISTORS; SILICON-BASED; SINGLE CHIPS;

BORON; SILICON WAFERS; THRESHOLD VOLTAGE;

MOSFET DEVICES;

EID: 84863322392 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4730437 Document Type: Article

Times cited : (24)

References (24)

1
- 84863319944
- International Technology Roadmafor Semiconductors 2009 Edition, Metrology
- International Technology Roadmap for Semiconductors 2009 Edition, Metrology.

2
- 0028548950
- 10.1109/16.333844
- T. Mizuno, J. Okamura, and A. Toriumi, IEEE Trans. Electron Devices 41, 2216 (1994). 10.1109/16.333844
- (1994) IEEE Trans. Electron Devices , vol.41 , pp. 2216
- Mizuno, T.¹ Okamura, J.² Toriumi, A.³

3
- 0032164821
- 10.1109/16.711362
- P. A. Stolk, F. P. Widdershoven, and D. B. M. Klassen, IEEE Trans. Electron Devices 45, 1960 (1998). 10.1109/16.711362
- (1998) IEEE Trans. Electron Devices , vol.45 , pp. 1960
- Stolk, P.A.¹ Widdershoven, F.P.² Klassen, D.B.M.³

4
- 0033169519
- 10.1109/16.777162
- A. Asenov and S. Saini, IEEE Trans. Electron Devices 46, 1718 (1999). 10.1109/16.777162
- (1999) IEEE Trans. Electron Devices , vol.46 , pp. 1718
- Asenov, A.¹ Saini, S.²

5
- 66649124356
- 10.1535/itj.1202.03
- K. Kuhn, C. Kenyon, A. Kornfeld, M. Liu, A. Maheshwari, W. Shih, S. Sivakumar, G. Taylor, P. VanDerVoorn, and K. Zawadzki, Intel Technol. J. 12, 93 (2008). 10.1535/itj.1202.03
- (2008) Intel Technol. J. , vol.12 , pp. 93
- Kuhn, K.¹ Kenyon, C.² Kornfeld, A.³ Liu, M.⁴ Maheshwari, A.⁵ Shih, W.⁶ Sivakumar, S.⁷ Taylor, G.⁸ Vandervoorn, P.⁹ Zawadzki, K.¹⁰

6
- 44849137489
- M. Kanno, A. Shibuya, M. Matsumura, K. Tamura, H. Tsuno, S. Mori, Y. Fukuzaki, T. Gocho, H. Ansai, and N. Nagashima, Symp. VLSI Tech. Dig. 2007, 88, http://dx.doi.org/10.1109/VLSIT.2007.4339738.
- Symp. VLSI Tech. Dig. , vol.2007 , pp. 88
- Kanno, M.¹ Shibuya, A.² Matsumura, M.³ Tamura, K.⁴ Tsuno, H.⁵ Mori, S.⁶ Fukuzaki, Y.⁷ Gocho, T.⁸ Ansai, H.⁹ Nagashima, N.¹⁰

7
- 75149159985
- 10.1143/JJAP.48.124505
- T. Tsunomura, A. Nishida, and T. Hiramoto, Jpn. J. Appl. Phys. 48, 124505 (2009). 10.1143/JJAP.48.124505
- (2009) Jpn. J. Appl. Phys. , vol.48 , pp. 124505
- Tsunomura, T.¹ Nishida, A.² Hiramoto, T.³

8
- 0016572578
- 10.1007/BF00896619
- R. W. Keyes, Appl. Phys. 8, 251 (1975). 10.1007/BF00896619
- (1975) Appl. Phys. , vol.8 , pp. 251
- Keyes, R.W.¹

9
- 27144459867
- 10.1038/nature04086
- T. Shinada, S. Okamoto, T. Kobayashi, and I. Ohdomari, Nature 437, 1128 (2005). 10.1038/nature04086
- (2005) Nature , vol.437 , pp. 1128
- Shinada, T.¹ Okamoto, S.² Kobayashi, T.³ Ohdomari, I.⁴

10
- 22244484728
- 10.1126/science.1111104
- S. Roy and A. Asenov, Science 309, 388 (2005). 10.1126/science.1111104
- (2005) Science , vol.309 , pp. 388
- Roy, S.¹ Asenov, A.²

11
- 52649096841
- 10.1063/1.2801013
- Y. Li and C. H. Hwang, J. Appl. Phys. 102, 084509 (2007). 10.1063/1.2801013
- (2007) J. Appl. Phys. , vol.102 , pp. 084509
- Li, Y.¹ Hwang, C.H.²

12
- 48649087666
- IEDM Tec. Dig
- K. Takeuchi, T. Fukai, T. Tsunomura, A. T. Putra, A. Nishida, S. Kamohara, and T. Hiramoto, IEDM Tec. Dig.., Tech. Papers 2007, 467, http://dx.doi.org/10.1109/IEDM.2007.4418975.
- Tech. Papers , vol.2007 , pp. 467
- Takeuchi, K.¹ Fukai, T.² Tsunomura, T.³ Putra, A.T.⁴ Nishida, A.⁵ Kamohara, S.⁶ Hiramoto, T.⁷

13
- 71049137739
- T. Tsunomura, A. Nishida, F. Yano, A. T. Putra, K. Takeuchi, S. Inaba, S. Kamohara, K. Terada, T. Mama, T. Hiramoto, and T. Mogami, VLSI Tech. Dig. Tech. Papers 2009, 110.
- VLSI Tech. Dig. Tech. Papers , vol.2009 , pp. 110
- Tsunomura, T.¹ Nishida, A.² Yano, F.³ Putra, A.T.⁴ Takeuchi, K.⁵ Inaba, S.⁶ Kamohara, S.⁷ Terada, K.⁸ Mama, T.⁹ Hiramoto, T.¹⁰ Mogami, T.¹¹

14
- 80053531563
- 10.1063/1.3644960
- H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama, N. Okada, M. Kato, H. Uchida, F. Yano, A. Nishida, T. Mogami, and Y. Nagai, Appl. Phys. Lett. 99, 133502 (2011). 10.1063/1.3644960
- (2011) Appl. Phys. Lett. , vol.99 , pp. 133502
- Takamizawa, H.¹ Shimizu, Y.² Inoue, K.³ Toyama, T.⁴ Okada, N.⁵ Kato, M.⁶ Uchida, H.⁷ Yano, F.⁸ Nishida, A.⁹ Mogami, T.¹⁰ Nagai, Y.¹¹

15
- 34548683658
- 10.1126/science.1145428
- K. Thompson, P. L. Flaitz, P. Ronsheim, D. J. Larson, and T. F. Kelly, Science 317, 1370 (2007). 10.1126/science.1145428
- (2007) Science , vol.317 , pp. 1370
- Thompson, K.¹ Flaitz, P.L.² Ronsheim, P.³ Larson, D.J.⁴ Kelly, T.F.⁵

16
- 70349967732
- 10.1016/j.ultramic.2009.08.002
- K. Inoue, F. Yano, A. Nishida, H. Takamizawa, T. Tsunomura, Y. Nagai, and M. Hasegawa, Ultramicroscopy 109, 1479 (2009). 10.1016/j.ultramic.2009.08.002
- (2009) Ultramicroscopy , vol.109 , pp. 1479
- Inoue, K.¹ Yano, F.² Nishida, A.³ Takamizawa, H.⁴ Tsunomura, T.⁵ Nagai, Y.⁶ Hasegawa, M.⁷

17
- 85014423157
- 10.1557/mrs2009.248
- L. J. Lauhon, P. Adusumilli, P. Ronsheim, P. L. Flaitz, and D. Lawrence, MRS Bull. 34, 738 (2009). 10.1557/mrs2009.248
- (2009) MRS Bull. , vol.34 , pp. 738
- Lauhon, L.J.¹ Adusumilli, P.² Ronsheim, P.³ Flaitz, P.L.⁴ Lawrence, D.⁵

18
- 80052525195
- 10.1016/j.ultramic.2011.01.017
- A. K. Kambham, J. Mody, M. Gilbert, S. Koelling, and W. Vandervorst, Ultramicroscopy 111, 535 (2011). 10.1016/j.ultramic.2011.01.017
- (2011) Ultramicroscopy , vol.111 , pp. 535
- Kambham, A.K.¹ Mody, J.² Gilbert, M.³ Koelling, S.⁴ Vandervorst, W.⁵

19
- 79959329747
- 10.1063/1.3597303
- Y. Shimizu, H. Takamizawa, K. Inoue, T. Toyama, Y. Nagai, N. Okada, M. Kato, H. Uchida, F. Yano, T. Tsunomura, A. Nishida, and T. Mogami, Appl. Phys. Lett. 98, 232101 (2011). 10.1063/1.3597303
- (2011) Appl. Phys. Lett. , vol.98 , pp. 232101
- Shimizu, Y.¹ Takamizawa, H.² Inoue, K.³ Toyama, T.⁴ Nagai, Y.⁵ Okada, N.⁶ Kato, M.⁷ Uchida, H.⁸ Yano, F.⁹ Tsunomura, T.¹⁰ Nishida, A.¹¹ Mogami, T.¹²

20
- 82955171614
- 10.1088/1742-6596/326/1/012030
- D. J. Larson, D. Lawrence, W. Lefebvre, D. Olson, T. J. Prosa, D. A. Reinhard, R. M. Ulfig, P. H. Clifton, J. H. Bunton, D. Lenz, J. D. Olson, L. Renaud, I. Martin, and T. F. Kelly, J. Phys.: Conf. Ser. 326, 012030 (2011). 10.1088/1742-6596/326/1/012030
- (2011) J. Phys.: Conf. Ser. , vol.326 , pp. 012030
- Larson, D.J.¹ Lawrence, D.² Lefebvre, W.³ Olson, D.⁴ Prosa, T.J.⁵ Reinhard, D.A.⁶ Ulfig, R.M.⁷ Clifton, P.H.⁸ Bunton, J.H.⁹ Lenz, D.¹⁰ Olson, J.D.¹¹ Renaud, L.¹² Martin, I.¹³ Kelly, T.F.¹⁴

21
- 84255190046
- 10.1116/1.3647879
- S. Jin, K. S. Jones, P. A. Ronsheim, and M. Hatzistergos, J. Vac. Sci. Technol. B 29 (6), 061203 (2011). 10.1116/1.3647879
- (2011) J. Vac. Sci. Technol. B , vol.29 , Issue.6 , pp. 061203
- Jin, S.¹ Jones, K.S.² Ronsheim, P.A.³ Hatzistergos, M.⁴

22
- 13444273231
- 10.1016/j.ultramic.2004.10.011
- M. K. Miller, K. F. Russel, and G. B. Thompson, Ultramicroscopy 102, 287 (2005). 10.1016/j.ultramic.2004.10.011
- (2005) Ultramicroscopy , vol.102 , pp. 287
- Miller, M.K.¹ Russel, K.F.² Thompson, G.B.³

23
- 33845659565
- 10.1016/j.ultramic.2006.06.008
- K. Thompson, D. Lawrence, D. J. Larson, J. D. Olson, T. F. Kelly, and B. Gorman, Ultramicroscopy 107, 131 (2007). 10.1016/j.ultramic.2006.06.008
- (2007) Ultramicroscopy , vol.107 , pp. 131
- Thompson, K.¹ Lawrence, D.² Larson, D.J.³ Olson, J.D.⁴ Kelly, T.F.⁵ Gorman, B.⁶

24
- 68249107039
- 10.1063/1.3186788
- K. Inoue, F. Yano, A. Nishida, H. Takamizawa, T. Tsunomura, Y. Nagai, and M. Hasegawa, Appl. Phys. Lett. 95, 043502 (2009). 10.1063/1.3186788
- (2009) Appl. Phys. Lett. , vol.95 , pp. 043502
- Inoue, K.¹ Yano, F.² Nishida, A.³ Takamizawa, H.⁴ Tsunomura, T.⁵ Nagai, Y.⁶ Hasegawa, M.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.