Atom-Probe Tomography of Semiconductor Materials and Device Structures

MRS Bulletin

Volumn 34, Issue 10, 2009, Pages 738-743

  Lauhon, Lincoln J ^a   Adusumilli, Praneet ^a   Paul, ^a   Ronsheim, ^a   Flaitz, Philip L ^a   Lawrence, Dan ^a  

^a NONE

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EID: 85014423157     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/mrs2009.248     Document Type: Article

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