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Volumn 45, Issue 24, 2012, Pages

Structure control of sputtered zinc oxide films by utilizing zinc oxide seed layers tailored by ion beam assisted sputtering

(3) Köhl, Dominik a Natarajan, Gomathi a Wuttig, Matthias a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE ORDER; ROOM TEMPERATURE; SEED LAYER; STRUCTURAL ORDERS; STRUCTURE CONTROL; UNHEATED SUBSTRATES; ZINC OXIDE THIN FILMS; ZNO FILMS;

ION BEAMS; ION BOMBARDMENT; OXIDE FILMS; TEXTURES;

ZINC OXIDE;

EID: 84861891088 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/45/24/245302 Document Type: Article

Times cited : (10)

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