Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 538-545

  Yoshino, Y ^a,b   Makino, T ^b   Katayama, Y ^b   Hata, T ^a  

^a KANAZAWA UNIVERSITY   (Japan)

^b MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001491267     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00313-4     Document Type: Article

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