Low-temperature c -axis oriented growth of nanocrystalline ZnO thin films on Si substrates by plasma assisted pulsed laser deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 214-218

  Shao, J ^a   Shen, Y Q ^a   Sun, J ^a   Xu, N ^a   Yu, D ^a   Lu, Y F ^a   Wu, J D ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; NANOCRYSTALLINE MATERIALS; PLASMA APPLICATIONS; PULSED LASER DEPOSITION; SILICON; ZINC OXIDE;

C -AXIS ORIENTATION; MICROWAVE DISCHARGE; NANOCRYSTALLINE ZINC OXIDE; OXYGEN PLASMA;

THIN FILMS;

EID: 38849122157     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2834567     Document Type: Article

References (27)

1. S. A. Aly, N. Z. El Sayed, and M. A. Kaid, Vacuum VACUAV 0042-207X 10.1016/S0042-207X(00)00415-2 61, 1 (2001).
2. R. Cebulla, R. Wendt, and K. Ellmer, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.366798 83, 1087 (1998).
3. A. Nahhas, H. K. Kim, and J. Blachere, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1355296 78, 1511 (2001).
4. S. K. Ghandhi, R. J. Field, and J. R. Shealy, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.91960 37, 449 (1980).
5. A. Kaschner, U. Haboeck, M. Strassburg, G. Kaczmarczyk, A. Hoffmann, C. Thomsen, A. Zeuner, H. R. Alves, D. M. Hofmann, and B. K. Meyer, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1461903 80, 1909 (2002).
6. S. Muthukumar, C. R. Gorla, N. W. Emanetoglu, S. Liang, and Y. Lu, J. Cryst. Growth JCRGAE 0022-0248 10.1016/S0022-0248(01)00874-0 225, 197 (2001).
7. O. Pagni, N. N. Somhlahlo, C. Weichsel, and A. W. R. Leitch, Physica B 376-377, 749 (2006). 0921-4526
8. T. Makino, G. Isoya, Y. Segawa, C. H. Chia, T. Yasuda, M. Kawasaki, A. Ohtomo, K. Tamura, and H. Koinuma, J. Cryst. Growth 214-215, 289 (2000). 0022-0248
9. H. Xu, K. Ohtani, M. Yamao, and H. Ohno, Phys. Status Solidi B PSSBBD 0370-1972 10.1002/pssb.200564657 243, 773 (2006).
10. V. Craciun, J. Elders, J. G. E. Gardeniers, and I. W. Boyd, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.112478 65, 2963 (1994).
11. S. L. King, J. G. E. Gardeniers, and I. W. Boyd, Appl. Surf. Sci. 9698, 811 (1996). 0169-4332
12. E. M. Kaidashev, M. Lorenz, H. V. Wenckstern, A. Rahm, H. C. Semmelhack, K. H. Han, G. Benndorf, C. Bundesmann, H. Hochmuth, and M. Grundmann, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1578694 82, 3901 (2003).
13. Ch. Pandis, N. Brilis, D. Tsamakis, H. A. Ali, S. Krishnamoorthy, and A. A. Iliadis, Solid-State Electron. SSELA5 0038-1101 10.1016/j.sse.2006.04.025 50, 1119 (2006).
14. D. B. Chrisey and G. K. Hubler, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
15. D. R. Lide, CRC Handbook of Chemistry and Physics, 82nd ed. (CRC, Boca Raton, FL, 2001), p. 5-3.
16. J. D. Wu, J. Sun, X. X. Zhong, Z. Y. Zhou, C. Z. Wu, and F. M. Li, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(99)00324-7 350, 101 (1999).
17. J. Sun, J. D. Wu, Z. F. Ying, W. Shi, F. M. Li, Z. Y. Zhou, K. L. Wang, and X. M. Ding, Appl. Phys. A: Mater. Sci. Process. APAMFC 0947-8396 A73, 91 (2001).
18. C. A. Arguello, D. L. Rousseau, and S. P. S. Porto, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.181.1351 181, 1351 (1969).
19. J. P. Atanas, R. A. Asmar, A. Khoury, and A. Foucaran, Sens. Actuators, A SAAPEB 0924-4247 10.1016/j.sna.2005.11.065 127, 49 (2006).
20. B. Cao, W. Cai, H. Zeng, and G. Duan, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2188132 99, 073516 (2006).
21. J. F. Scott, Phys. Rev. B PLRBAQ 0556-2805 10.1103/PhysRevB.2.1209 2, 1209 (1970).
22. C. Bundesmann, N. Ashkenov, M. Schubert, D. Spemann, T. Butz, E. M. Kaidashev, M. Lorenz, and M. Grundmann, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1609251 83, 1974 (2003).
23. J. B. Wang, H. M. Zhong, Z. F. Li, and W. Lu, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2185261 88, 101913 (2006).
24. K. Draou, N. Bellakhal, B. G. Cheron, and J. L. Brisset, Mater. Chem. Phys. 51, 142 (1997). 0254-0584
25. N. Fujimura, T. Nishahara, S. Goto, J. Xu, and T. Ito, J. Cryst. Growth JCRGAE 0022-0248 10.1016/0022-0248(93)90861-P 130, 269 (1993).
26. F. Yakuphanoglu, Y. Caglar, S. Ilican, and M. Caglar, Physica B 394, 86 (2007). 0921-4526
27. S. J. Pearton, D. P. Norton, K. Ip, Y. W. Heo, and T. Steiner, Superlattices Microstruct. SUMIEK 0749-6036 10.1016/S0749-6036(03)00093-4 34, 3 (2003).