SCOPUS 정보 검색 플랫폼

Volumn 84, Issue 1-2, 2006, Pages 161-164

Microstructure evolution of Al-doped zinc oxide films prepared by in-line reactive mid-frequency magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); MAGNETRON SPUTTERING; MICROSTRUCTURE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

CRYSTALLITES; FILM STRUCTURE; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 33646681026 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3581-5 Document Type: Article

Times cited : (16)

References (10)

1
- 0033170232
- B. Szyszka, Thin Solid Films 351, 164 (1999)
- (1999) Thin Solid Films , vol.351 , pp. 164
- Szyszka, B.¹

2
- 0037363311
- R.J. Hong, X. Jiang, G. Heide, B. Szyszka, V. Sittinger, W. Werner, J. Cryst. Growth 249, 461 (2003)
- (2003) J. Cryst. Growth , vol.249 , pp. 461
- Hong, R.J.¹ Jiang, X.² Heide, G.³ Szyszka, B.⁴ Sittinger, V.⁵ Werner, W.⁶

3
- 0038286276
- R.J. Hong, X. Jiang, B. Szyszka, V. Sittinger, S.H. Xu, W. Werner, G. Heide, J. Cryst. Growth 253, 117 (2003)
- (2003) J. Cryst. Growth , vol.253 , pp. 117
- Hong, R.J.¹ Jiang, X.² Szyszka, B.³ Sittinger, V.⁴ Xu, S.H.⁵ Werner, W.⁶ Heide, G.⁷

4
- 0141525086
- B. Szyszka, V. Sittinger, X. Jiang, R.J. Hong, W. Werner, A. Pflug, M. Ruske, A. Lopp, Thin Solid Films 442, 179 (2003)
- (2003) Thin Solid Films , vol.442 , pp. 179
- Szyszka, B.¹ Sittinger, V.² Jiang, X.³ Hong, R.J.⁴ Werner, W.⁵ Pflug, A.⁶ Ruske, M.⁷ Lopp, A.⁸

5
- 0017971014
- S. Maniv, A. Zangvil, J. Appl. Phys. 49, 2787 (1978)
- (1978) J. Appl. Phys. , vol.49 , pp. 2787
- Maniv, S.¹ Zangvil, A.²

6
- 0001431328
- Y.E. Lee, J.B. Lee, Y.J. Kim, H.K. Yang, J.C. Park, H.J. Kim, J. Vac. Sci. Technol. A 14, 1943 (1996)
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1943
- Lee, Y.E.¹ Lee, J.B.² Kim, Y.J.³ Yang, H.K.⁴ Park, J.C.⁵ Kim, H.J.⁶

7
- 0001670507
- A. Kuroyanagi, J. Appl. Phys. 66, 5492 (1989)
- (1989) J. Appl. Phys. , vol.66 , pp. 5492
- Kuroyanagi, A.¹

8
- 0001590465
- V. Gupta, A. Mansingh, J. Appl. Phys. 80, 1063 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 1063
- Gupta, V.¹ Mansingh, A.²

9
- 0035311881
- M. Chen, Z.L. Pei, X. Wang, C. Sun, L.S. Wen, Mater. Lett. 48, 137 (2001)
- (2001) Mater. Lett. , vol.48 , pp. 137
- Chen, M.¹ Pei, Z.L.² Wang, X.³ Sun, C.⁴ Wen, L.S.⁵

10
- 0003605465
- A. van der Drift, Philips Res. Rep. 22, 267 (1967)
- (1967) Philips Res. Rep. , vol.22 , pp. 267
- Van Der Drift, A.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.