Structural improvement of zinc oxide films produced by ion beam assisted reactive sputtering

Journal of Physics D: Applied Physics

Volumn 43, Issue 20, 2010, Pages

  Kohl D ^a   Luysberg, M ^b   Wuttig, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

[A] GROWTH MODELS; CRYSTALLINE ORDER; CRYSTALLINE QUALITY; GROWTH OF FILMS; GROWTH PROCESS; HEATED SUBSTRATES; NUCLEATION STAGES; ROOM TEMPERATURE DEPOSITION; STRUCTURAL EVOLUTION; STRUCTURAL IMPROVEMENTS; STRUCTURAL INVESTIGATION; STRUCTURAL ORDERS; STRUCTURAL QUALITIES; UNHEATED SUBSTRATES; ZINC OXIDE THIN FILMS; ZNO FILMS;

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; FILM GROWTH; IONS; OXIDE FILMS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; XENON; ZINC; ZINC OXIDE;

ION BOMBARDMENT;

EID: 77952382015     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/20/205301     Document Type: Article

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