Impurity-doped ZnO thin films prepared by physical deposition methods appropriate for transparent electrode applications in thin-film solar cells

IOP Conference Series: Materials Science and Engineering

Volumn 34, Issue 1, 2012, Pages

  Tadatsugu Minami, ^a   Toshihiro Miyata, ^a   Jun Ichi Nomoto, ^a   Minami, Tadatsugu ^a   Miyata, Toshihiro ^a   Nomoto, Jun Ichi ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AZO FILMS; DEPOSITION METHODS; GA-DOPED ZNO; GLASS SUBSTRATES; HCL SOLUTION; MAGNETRON-SPUTTERING DEPOSITION; NEAR INFRARED REGION; SCATTERING CHAR-ACTERISTICS; STABILITY EVALUATION; SURFACE TEXTURES; THIN-FILM SOLAR CELLS; TRANSPARENT ELECTRODE; VACUUM ARC PLASMA EVAPORATION; WET-CHEMICAL ETCHING; ZNO THIN FILM;

CONDUCTIVE FILMS; DEPOSITION; ELECTRIC PROPERTIES; LIGHT SCATTERING; METALLIC FILMS; NANOSTRUCTURED MATERIALS; OPTICAL FILMS; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; SEMICONDUCTOR DOPING; STABILITY; SUBSTRATES; SURFACES; TEXTURES; THIN FILMS; VACUUM APPLICATIONS; VAPOR DEPOSITION; WET ETCHING; ZINC OXIDE;

FILM PREPARATION;

EID: 84861309629     PISSN: 17578981     EISSN: 1757899X     Source Type: Conference Proceeding    
DOI: 10.1088/1757-899X/34/1/012001     Document Type: Conference Paper

References (54)

1. Minami T, Miyata T 2008 Thin Solid Films 517 1474
2. Yamamoto N, Makino H, Yamada T, Hirashima Y, Iwaoka H, Ito T, Ujihara A, Hokari H, Morita H, Yamamoto T 2010 J. Electrochem. Soc. 157 J13
3. Tseng Z T, Kao P C, Chen Y C, Juang Y D, Kuo Y M, Chu S Y 2011 J. Electrochem. Soc. 158 J310
4. Kim H, Horwitz J S, Kim W H, Makinen A J, Kafafi Z H, Chrisey D B 2002 Thin Solid Films 420-421 539 (Pubitemid 35459773)
5. Dawar A L, Jain A K, Jagadish C, Hartnagel H ed 1995 Semiconducting Transparent Thin Films (Inst of Physics Pub Inc)
6. Minami T 2000 MRS Bulletin 25 38
7. Minami T 2005 Semicond. Sci. Technol. 20 S35
8. Nomoto J, Miyata T, Minami T 2011 J. Vac. Sci. Technol. A 29 041504
9. Wenas W, Yamada A, Konagai M, Takahashi K 1991 Japan. J. Appl. Phys. 30 L441
10. Kushiya K, Ohshita Y, Hara I, Tanaka Y, Sang B, Nagoya Y, Tachiyuki M, Yamase O 2003 Solar Energy Materials Solar Cells 75 171 (Pubitemid 35281690)
11. Krc J, Zeman M, Kluth O, Smole F, Topic M 2003 Thin Solid Films 426 296
12. Müller J, Rech B, Springe J, Vanecek M 2004 Solar Energy 77 917 (Pubitemid 39605899)
13. Yoo J, Lee J, Kim S, Yoon K, Park I J, Dhungel S K, Karunagaran B, Mangalaraj D, Yi J 2005 Thin Solid Films 480-481 213 (Pubitemid 40642979)
14. Beyer W, Hüpkes J, Stiebig H 2007 Thin Solid Films 516 147 (Pubitemid 350110588)
15. Rocjstuh C, Lederer F, Bittkau K, Carius R 2007 Appl. Phys. Lett. 91 171104 (Pubitemid 350015200)
16. Ruske F, Jacobs C, Sittinger V, Szyszka B, Werner W 2007 Thin Solid Films 515 8695 (Pubitemid 47444332)
17. Sittinger V, Ruske F, Werner W, Jacobs C, Szyszka B, Christie D J 2008 Thin Solid Films 516 5847 (Pubitemid 351726010)
18. Tohsophon T, Hüpkes J, Siekmann H, Rech B, Schultheis M, Sirikulrat N 2008 Thin Solid Films 516 4628 (Pubitemid 351601585)
19. Zhu H, Bunte E, Hüpkes J, Siekmann H, Huang S M 2009 Thin Solid Films 517 3161
20. Kang D W, Kuk S H, Ji K S, Ahn S W, Han M K 2010 Japan. J. Appl. Phys. 49 031101
21. Liu H, Avrutin V, Izyumskaya N, Özgür Ü, Morkoc H 2010 Superlattices Microstructures 48 458
22. Moon T, Yoon W, Ji K S, Ahn S W, Lee S, Joo M, Shin H Y, Park K, Lee H M 2010 Appl Phys. Express 3 095801
23. Rath J K, Liu Y, Jong M M, Wild J, Schuttauf J A, Brinza M, Schropp R E 2010 Thin Solid Films 518 e129
24. Dewan R, Vasilev I, Jovanov V, Knipp D 2010 J. Appl. Phys. 110 013101
25. Krc J, Lipovsek B, Bokalic M, Campa A, Oyama T, Kambe M, Matsui T, Sai H, Kondo M, Topic M 2010 Thin Solid Films 518 3054
26. Agra H, Suzuki A, Matsushita T, Aoki T, Okuda M 2003 Thin Solid Films 445 263
27. Yamada T, Miyake A, Kishimoto S, Makino H, Yamamoto N, Yamamoto T 2007 Appl. Phys. Lett. 91 051915 (Pubitemid 47210793)
28. Nomoto J, Hirano T, Miyata T, Minami T 2010 Proc. of the 17th Int. Display Workshops p 371
29. Tanaka H, Ihara K, Miyata T, Sato H, Minami T 2004 J. Vac. Sci. Technol. A 22 1757
30. Miyata T, Honma Y, Minami T 2007 J. Vac. Sci. Technol. A 25 1193 (Pubitemid 47142961)
31. Nomoto J, Konagai M, Miyata T, Minami T 2010 J. Vac. Sci. Technol. A 28 861
32. Nomoto J, Hirano T Miyata T, Minami T 2011 Thin Solid Films, online available October 8
33. Minami T, Hirano T, Noguchi Y, Miyata T, Nomoto J 2011 Thin Solid Films, to be published
34. Tominaga K, Yuasa T, Kume M, Tada O 1985 Japan. J. Appl. Phys. 24 944
35. Tominaga K, Kuroda K, Tada O 1988 Japan. J. Appl. Phys. 27 1176
36. Ellmer K, Cebulla R, Wendt R 1998 Surface Coatings Technol. 98 1251
37. Ishibashi S, Higuchi Y, Ota Y and Nakamura K 1990 J. Vac. Sci. Technol. A 8 1403
38. Ichihara K, Inoue N, Okubo M and Yasuda N 1994 Thin Solid Films 245 152
39. Minami T, Miyata T, Yamamoto T, Toda H 2000 J. Vac. Sci. Technol. A 18 1584
40. Minami T, Sato H, Nanto H, Takata S 1985 Japan. J. Appl. Phys. 24 L781
41. Oda J, Nomoto J, Miyata T, Minami T 2010 Thin Solid Films 519 2984
42. Minami T, Oda J, Nomoto J, Miyata T 2010 J. Vac. Sci. Technol. A 28 842
43. Pisarkiewicz T, Zakrzewska K, Leja E 1989 Thin Solid Films 174 217 (Pubitemid 20615878)
44. Minami T, Sato H, Ohashi K, Tomofuji T, Takata S 1992 J. Crystal Growth 117 370
45. Minami T, Suzuki S, Miyata T 2010 Mater. Res. Soc. Symp. Proc. 666 F1.3.1
46. Kluth O, Schöpe G, Rech B, Menner R, Oertel M, Orgassa K, Schock HW 2006 Thin Solid Films 502 311 (Pubitemid 43290072)
47. Sato H, Minami T, Takata S, Mouri T, Ogawa N 1992 Thin Solid Films 220 327 (Pubitemid 23614459)
48. Nomoto J, Konagai M, Okada K, Ito T, Miyata T, Minami T 2010 Thin Solid Films 518 2937
49. Nagoya Y, Sang B, Fujiwara Y, Kushiya K, Yamase O 2003 Solar Energy Mater. Solar Cells 75 163 (Pubitemid 35281689)
50. Minami T 2008 Thin Solid Films 516 5822
51. International Electrotechnical Commission Environmental Testing-Damp Heat 60068-2-78
52. International Electrotechnical Commission Environmental Testing-Damp Heat 60068-2-3
53. Minami T, Miyata T, Ohtani Y, Kuboi T 2007 Phys. Stat. Sol. (RRL) 1 R31 (Pubitemid 351175990)
54. Minami T 2008 Thin Solid Films 516 1314 (Pubitemid 351172386)