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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 4, 2011, Pages

Optical and electrical properties of transparent conducting B-doped ZnO thin films prepared by various deposition methods

(3) Nomoto, Jun Ichi a Miyata, Toshihiro a Minami, Tadatsugu a

a KANAZAWA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC RATIO; DEPOSITION METHODS; GA-DOPED ZNO; GLASS SUBSTRATES; HIGH-HUMIDITY ENVIRONMENT; OPTICAL AND ELECTRICAL PROPERTIES; RF-MAGNETRON SPUTTERING; THIN-FILM SOLAR CELLS; TRANSPARENT ELECTRODE; VACUUM ARC PLASMA EVAPORATION; WAVELENGTH RANGES; ZNO; ZNO THIN FILM;

CARRIER MOBILITY; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC PROPERTIES; GALLIUM; GALVANOMAGNETIC EFFECTS; HEAT RESISTANCE; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; PLASMA DEPOSITION; PULSED LASER DEPOSITION; SUBSTRATES; THIN FILMS; VACUUM EVAPORATION; VAPOR DEPOSITION; ZINC OXIDE;

FILM PREPARATION;

EID: 79960513815 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3591348 Document Type: Article

Times cited : (14)

References (29)

1
- 0024705246
- Scattering of charge carriers in transparent and conducting thin oxide films with a non-parabolic conduction band
- DOI 10.1016/0040-6090(89)90892-4
- T. Pisarkiewicz, K. Zakrzewska, and E. Leja, Thin Solid Films 174, 217 (1989). 10.1016/0040-6090(89)90892-4 (Pubitemid 20615878)
- (1989) Thin Solid Films , vol.174 , Issue.1-2 PART 1 , pp. 217-223
- Pisarkiewicz, T.¹ Zakrzewska, K.² Leja, E.³

2
- 0027107604
- 10.1016/0022-0248(92)90778-H
- T. Minami, H. Sato, K. Ohashi, T. Tomofuji, and S. Takata, J. Cryst. Growth 117, 370 (1992). 10.1016/0022-0248(92)90778-H
- (1992) J. Cryst. Growth , vol.117 , pp. 370
- Minami, T.¹ Sato, H.² Ohashi, K.³ Tomofuji, T.⁴ Takata, S.⁵

3
- 0035556517
- 10.1557/PROC-666-F1.3
- T. Minami, S. Suzuki, and T. Miytata, Mater. Res. Soc. Symp. Proc. 666, F1.3.1 (2001). 10.1557/PROC-666-F1.3
- (2001) Mater. Res. Soc. Symp. Proc. , vol.666 , pp. 131
- Minami, T.¹ Suzuki, S.² Miytata, T.³

4
- 0034215434
- Part 1, 10.1143/JJAP.39.4158
- N. Yamada, I. Yasui, Y. Shigesato, H. Li, Y. Ujihira, and K, Nomura, Jpn. J. Appl. Phys. Part 1 39, 4158 (2000). 10.1143/JJAP.39.4158
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 4158
- Yamada, N.¹ Yasui, I.² Shigesato, Y.³ Li, H.⁴ Ujihira, Y.⁵ Nomura, K.⁶

5
- 0038106845
- Transparent Conductive Zinc Oxide, edited by K. Ellmer, A. Klein, and B. Rech, (Springer, Berlin)
- Transparent Conductive Zinc Oxide, edited by, K. Ellmer, A. Klein, and, B. Rech, Materials Science, Vol. 104 (Springer, Berlin, 2008).
- (2008) Materials Science , vol.104

6
- 84985579906
- 10.1002/pssb.v14:1
- R. Groth, Phys. Status Solidi B 14, 69 (1966). 10.1002/pssb.v14:1
- (1966) Phys. Status Solidi B , vol.14 , pp. 69
- Groth, R.¹

7
- 24144445134
- Titanium-doped indium oxide: A high-mobility transparent conductor
- DOI 10.1063/1.1995957, 032111
- M. F. A. M. van Hest, M. S. Dabney, J. D. Perkins, D. S. Ginley, and M. P. Taylor, Appl. Phys. Lett. 87, 032111 (2005). 10.1063/1.1995957 (Pubitemid 41227616)
- (2005) Applied Physics Letters , vol.87 , Issue.3 , pp. 1-3
- Van Hest, M.F.A.M.¹ Dabney, M.S.² Perkins, J.D.³ Ginley, D.S.⁴ Taylor, M.P.⁵

8
- 34047115785
- 3-based transparent conductive oxide thin films by Zr-doping
- DOI 10.1063/1.2711768
- T. Koida and M. Kondo, J. Appl. Phys. 101, 063705 (2007). 10.1063/1.2711768 (Pubitemid 46517015)
- (2007) Journal of Applied Physics , vol.101 , Issue.6 , pp. 063705
- Koida, T.¹ Kondo, M.²

9
- 0035881670
- 10.1016/S0040-6090(01)01142-7
- Y. Meng, X. Yang, H. Chen, J. Shen, Y. Jiang, Z. Zhang, and Z. Hua, Thin Solid Films 394, 218 (2001). 10.1016/S0040-6090(01)01142-7
- (2001) Thin Solid Films , vol.394 , pp. 218
- Meng, Y.¹ Yang, X.² Chen, H.³ Shen, J.⁴ Jiang, Y.⁵ Zhang, Z.⁶ Hua, Z.⁷

10
- 34547850444
- 3 as high-mobility transparent conductive oxide
- DOI 10.1143/JJAP.46.L685
- T. Koida, H. Fujisawa, and M. Kondo, Jpn. J. Appl. Phys. Part 2 46, L685 (2007). 10.1143/JJAP.46.L685 (Pubitemid 47245296)
- (2007) Japanese Journal of Applied Physics, Part 2: Letters , vol.46 , Issue.25-28
- Koida, T.¹ Fujiwara, H.² Kondo, M.³

11
- 0022146289
- 10.1143/JJAP.24.L781
- T. Minami, H. Sato, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. Part 2 24, L781 (1985). 10.1143/JJAP.24.L781
- (1985) Jpn. J. Appl. Phys. Part 2 , vol.24 , pp. 781
- Minami, T.¹ Sato, H.² Nanto, H.³ Takata, S.⁴

12
- 0030420019
- 10.1557/PROC-426-411
- T. Nakada, N. Murakami, and K. Kunioka, Mater. Res. Soc. Symp. Proc. 426, 411 (1996). 10.1557/PROC-426-411
- (1996) Mater. Res. Soc. Symp. Proc. , vol.426 , pp. 411
- Nakada, T.¹ Murakami, N.² Kunioka, K.³

13
- 0027542764
- 10.1143/JJAP.32.726
- M. Yoshino, W. Wenas, A. Yamada, M. Konagai, and K. Takahashi, Jpn. J. Appl. Phys. Part 1 32, 726 (1993). 10.1143/JJAP.32.726
- (1993) Jpn. J. Appl. Phys. Part 1 , vol.32 , pp. 726
- Yoshino, M.¹ Wenas, W.² Yamada, A.³ Konagai, M.⁴ Takahashi, K.⁵

14
- 34547335721
- Preparation of transparent conducting B-doped ZnO films by vacuum arc plasma evaporation
- DOI 10.1116/1.2484424
- T. Miyata, Y. Honma, and T. Minami, J. Vac. Sci. Technol. A 25, 1193 (2007). 10.1116/1.2484424 (Pubitemid 47142961)
- (2007) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.25 , Issue.4 , pp. 1193-1197
- Miyata, T.¹ Honma, Y.² Minami, T.³

15
- 17044403452
- Transparent conducting oxide semiconductors for transparent electrodes
- DOI 10.1088/0268-1242/20/4/004
- T. Minami, Semicond. Sci. Technol. 20, S35 (2005). 10.1088/0268-1242/20/ 4/004 (Pubitemid 40496724)
- (2005) Semiconductor Science and Technology , vol.20 , Issue.4
- Minami, T.¹

16
- 33646490764
- 10.1143/JJAP.45.L409
- T. Minami, T. Miyata, Y. Ohtani, and Y. Mochizuki, Jpn. J. Appl. Phys. Part 2 45, L409 (2006). 10.1143/JJAP.45.L409
- (2006) Jpn. J. Appl. Phys. Part 2 , vol.45 , pp. 409
- Minami, T.¹ Miyata, T.² Ohtani, Y.³ Mochizuki, Y.⁴

17
- 0004634789
- 10.1016/0040-6090(90)90224-2
- T. Minami, K. Oohashi, S. Takata, T. Mouri, and N. Ogawa, Thin Solid Films 193-194, 721 (1990). 10.1016/0040-6090(90)90224-2
- (1990) Thin Solid Films , vol.193-194 , pp. 721
- Minami, T.¹ Oohashi, K.² Takata, S.³ Mouri, T.⁴ Ogawa, N.⁵

18
- 4344639646
- 10.1116/1.1763903
- H. Tanaka, K. Ihara, T. Miyata, H. Sato, and T. Minami, J. Vac. Sci. Technol. A 22, 1757 (2004). 10.1116/1.1763903
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 1757
- Tanaka, H.¹ Ihara, K.² Miyata, T.³ Sato, H.⁴ Minami, T.⁵

19
- 0035204937
- 10.1016/S0927-0248(00)00086-6
- Y. Yamamoto, K. Saito, K. Takahashi, and M. Konagai, Sol. Energy Mater. Sol. Cells 65, 125 (2001). 10.1016/S0927-0248(00)00086-6
- (2001) Sol. Energy Mater. Sol. Cells , vol.65 , pp. 125
- Yamamoto, Y.¹ Saito, K.² Takahashi, K.³ Konagai, M.⁴

20
- 0034251174
- 10.1557/mrs2000.149
- T. Minami, MRS Bull. 25, 38 (2000). 10.1557/mrs2000.149
- (2000) MRS Bull. , vol.25 , pp. 38
- Minami, T.¹

21
- 0034251416
- 10.1557/mrs2000.151
- R. G. Gordon, MRS Bull. 25, 52 (2000). 10.1557/mrs2000.151
- (2000) MRS Bull. , vol.25 , pp. 52
- Gordon, R.G.¹

22
- 61449233171
- 10.1016/j.tsf.2008.11.081
- T. Yamada, A. Miyake, H. Makino, N. Yamamoto, and T. Yamamoto, Thin Solid Films 517, 3134 (2009). 10.1016/j.tsf.2008.11.081
- (2009) Thin Solid Films , vol.517 , pp. 3134
- Yamada, T.¹ Miyake, A.² Makino, H.³ Yamamoto, N.⁴ Yamamoto, T.⁵

23
- 0022113552
- Part 1, 10.1143/JJAP.24.944
- K. Tominaga, T. Yuasa, M. Kume, and O. Tada, Jpn. J. Appl. Phys. Part 1 24, 944 (1985). 10.1143/JJAP.24.944
- (1985) Jpn. J. Appl. Phys. , vol.24 , pp. 944
- Tominaga, K.¹ Yuasa, T.² Kume, M.³ Tada, O.⁴

24
- 0024038627
- 10.1143/JJAP.27.1176
- K. Tominaga, K. Kuroda, and O. Tada, Jpn. J. Appl. Phys. Part 1 27, 1176 (1988). 10.1143/JJAP.27.1176
- (1988) Jpn. J. Appl. Phys. Part 1 , vol.27 , pp. 1176
- Tominaga, K.¹ Kuroda, K.² Tada, O.³

25
- 56949089838
- 10.1016/j.tsf.2008.09.059
- T. Minami and T. Miyata, Thin Solid Films 517, 1474 (2008). 10.1016/j.tsf.2008.09.059
- (2008) Thin Solid Films , vol.517 , pp. 1474
- Minami, T.¹ Miyata, T.²

26
- 79960502325
- International Electrotechnical Commission Environmental testing-Damheat 60068-2-78
- International Electrotechnical Commission Environmental testing-Damp heat 60068-2-78.

27
- 79960544225
- International Electrotechnical Commission Environmental testing-Damheat 60068-2-3
- International Electrotechnical Commission Environmental testing-Damp heat 60068-2-3.

28
- 77954211459
- 10.1116/1.3455814
- J. Nomoto, M. Konagai, T. Miyata, and T. Minami, J. Vac. Sci. Technol. A 28, 861 (2010). 10.1116/1.3455814
- (2010) J. Vac. Sci. Technol. A , vol.28 , pp. 861
- Nomoto, J.¹ Konagai, M.² Miyata, T.³ Minami, T.⁴

29
- 34547702969
- 10.1002/pssr.v1:1
- T. Minami, T. Miyata, Y. Ohtani, and T. Kuboi, Phys. Status Solidi (RRL) 1, R31 (2007). 10.1002/pssr.v1:1
- (2007) Phys. Status Solidi (RRL) , vol.1 , pp. 31
- Minami, T.¹ Miyata, T.² Ohtani, Y.³ Kuboi, T.⁴

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