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Volumn 520, Issue 5, 2011, Pages 1400-1406

Preparation of Al-doped ZnO transparent electrodes suitable for thin-film solar cell applications by various types of magnetron sputtering depositions

(4) Nomoto, Jun Ichi a Hirano, Tomoyasu a Miyata, Toshihiro a Minami, Tadatsugu a

a KANAZAWA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

AZO; Haze; Magnetron sputtering; Solar cell; Thin film; Thin film solar cell; Transparent conducting oxide; Transparent electrode; ZnO

Indexed keywords

AZO; HAZE; THIN-FILM SOLAR CELLS; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT ELECTRODE; ZNO;

ALUMINUM; CONDUCTIVE FILMS; DC POWER TRANSMISSION; DEPOSITION; ELECTRODES; HALL MOBILITY; HYDROCHLORIC ACID; MAGNETRON SPUTTERING; SOLAR CELLS; SUBSTRATES; SURFACE MORPHOLOGY; THIN FILMS; VAPOR DEPOSITION; WET ETCHING; ZINC OXIDE;

FILM PREPARATION;

EID: 82755161809 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.10.003 Document Type: Conference Paper

Times cited : (99)

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