Electrical, optical and microstructural properties of transparent conducting GZO thin films deposited by magnetron sputtering

Journal of Alloys and Compounds

Volumn 530, Issue , 2012, Pages 11-17

  You, Z Z ^a   Hua, G J ^a  

^a SOUTH CENTRAL UNIVERSITY FOR NATIONALITIES   (China)

Author keywords

Optical properties; Sputtering; Thin films; Transparent conducting oxide

Indexed keywords

CRYSTAL GRAINS; DIELECTRIC FUNCTIONS; DISPERSION BEHAVIOR; DISSIPATION FACTORS; ELECTRICAL CHARACTERISTIC; FIGURE OF MERITS; GLASS SUBSTRATES; HEXAGONAL WURTZITE; MICRO-STRUCTURAL; MICROSTRUCTURAL PROPERTIES; OPTICAL ENERGY GAP; OPTOELECTRICAL PROPERTIES; OSCILLATOR PARAMETERS; POLYCRYSTALLINE; PREFERRED GRAIN ORIENTATIONS; SUBSTRATE TEMPERATURE; TRANSPARENT CONDUCTING OXIDE;

MAGNETRON SPUTTERING; OPTICAL CONSTANTS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SPUTTERING; SUBSTRATES; THIN FILMS; ZINC OXIDE; ZINC SULFIDE;

ELECTRIC PROPERTIES;

EID: 84860543999     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2012.03.078     Document Type: Article

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