Electrical and optical properties of ZnO:Al film prepared on polyethersulfone substrate by RF magnetron sputtering

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Volumn 337, Issue 1-3, 2009, Pages 52-56

  Lin, Y C ^a   Chen, M Z ^a   Kuo, C C ^a   Yen, W T ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

AZO thin film; Polyethersulfone; RF magnetron sputtering; Transparent conducting film

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC RESISTANCE; MAGNETRON SPUTTERING; MAGNETRONS; OPTICAL PROPERTIES; SEMICONDUCTING ZINC COMPOUNDS; SOLIDS; SUBSTRATES; THIN FILM DEVICES; THIN FILMS; ZINC OXIDE;

AZO THIN FILM; CRYSTALLINE QUALITIES; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL RESISTIVITIES; OPTICAL TRANSMITTANCES; POLYETHERSULFONE; PROCESS PARAMETERS; RADIO FREQUENCIES; RF MAGNETRON SPUTTERING; RF-POWER; SUBSTRATE BIAS; TRANSPARENT CONDUCTING FILM; VISIBLE REGIONS; WORKING PRESSURES; ZNO; ZNO:AL FILMS;

OPTICAL FILMS;

ALUMINUM; POLYETHERSULFONE; ZINC OXIDE;

ARTICLE; CONTROLLED STUDY; OSCILLATION; PRIORITY JOURNAL; RADIOFREQUENCY RADIATION; SCANNING ELECTRON MICROSCOPE; ULTRAVIOLET SPECTROPHOTOMETRY; X RAY DIFFRACTION;

EID: 59349102095     PISSN: 09277757     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.colsurfa.2008.11.049     Document Type: Article

References (14)

1. Hartnagel H.L., Dawar A.L., Jain A.K., and Jagadish C. Semiconducting Transparent Thin Films (1995), Institute of Physics Publishing, Bristol and Philadelphia
2. Lin Y.C., Li J.Y., and Yen W.T. Appl. Surf. Sci. 254 (2008) 3262
3. Lin Y.C., Jian Y.C., and Jiang J.H. Appl. Surf. Sci. 254 (2008) 2671
4. Rim Y.S., Kim S.M., Choi H.W., Park S.J., and Kim K.H. Colloids Surf. A. 313-314 (2008) 461
5. Moon C.S., Chung Y.M., Jung W.S., and Han J.G. Surf. Coat. Technol. 210 (2007) 5035
6. Chen X., Guan W., Fang G., and Zhao X.Z. Appl. Surf. Sci. 252 (2005) 1561
7. Fortunato E., Nunes P., Costa D., Brida D., Ferreira I., and Martins R. Vacuum 64 (2002) 233
8. Malinovska D.D., Tzenov N., Tzolov M., and Vassilev L. Mater. Sci. Eng. B52 (1998) 59
9. Jeong W.J., and Park G.C. Sol. Energy Mater. Sol. Cells 65 (2001) 37
10. Nunes P., Costa D., Fortunato E., and Martins R. Vacuum 64 (2002) 293
11. Thornton J.A., and Hoffman D.W. J. Vac. Sci. Technol. A3 (1985) 576
12. Ohring M. The Materials Science of Thin Films. 2nd ed. (1992), Academic Press, Boston
13. Thornton J.A., and Hoffman D.W. Thin Solid Films 171 (1989) 5
14. Ma H.L., Hao X.T., Ma J., Yang Y.G., Huang S.L., Chen F., Wang Q.P., and Zhang D.H. Surf. Coat. Technol. 161 (2002) 58