Optical and structural properties of ZnO/TiO2/ZnO multi-layers prepared via electron beam evaporation

Vacuum

Volumn 83, Issue 5, 2009, Pages 878-882

  Choi, Won Seok ^a   Kim, Eui Jung ^a   Seong, Seung Gie ^a   Kim, Yong Soo ^a   Park, Chinho ^b   Hahn, Sung Hong ^a  

^a University of Ulsan   (South Korea)

^b Yeungnam University   (South Korea)

Author keywords

Electron beam evaporation; Photoluminescence; Thin films; TiO2 buffer layer; ZnO

Indexed keywords

BUFFER LAYERS; CONCENTRATION (PROCESS); ELECTRON BEAMS; ELECTRON GUNS; EMISSION SPECTROSCOPY; EVAPORATION; LIGHT EMISSION; LUMINESCENCE; METALLIC FILMS; MOISTURE; OPTICAL FILMS; OPTICAL WAVEGUIDES; OXIDE MINERALS; OXYGEN; OXYGEN VACANCIES; PARTICLE BEAMS; QUARTZ; SEMICONDUCTING ZINC COMPOUNDS; SOLIDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPORS; ZINC ALLOYS; ZINC OXIDE;

CRYSTALLINITY; DEFECT CONCENTRATIONS; DEFECT LEVELS; ELECTRON BEAM EVAPORATION; ELECTRON BEAM EVAPORATIONS; GREEN EMISSIONS; MULTI-LAYERS; OPTICAL-; QUARTZ GLASS SUBSTRATES; TIO2 BUFFER LAYER; ZNO; ZNO THIN FILMS; ZNO/TIO;

FILM PREPARATION;

EID: 56949096340     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.09.006     Document Type: Article

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