Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

Ceramics International

Volumn 38, Issue SUPPL. 1, 2012, Pages

  Jung, Keun ^a,b   Choi, Won Kook ^a   Yoon, Seok Jin ^a   Kim, Hyun Jae ^b   Choi, Ji Won ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

C. Electrical conductivity; C. Optical properties; D. ZnO; E. Electrodes

Indexed keywords

COMPOSITION SPREAD; D. ZNO; DIFFERENT SUBSTRATES; DOPED ZNO; E. ELECTRODES; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL CONDUCTIVITY; GA-DOPED ZNO; LOW RESISTIVITY; SUBSTRATE TEMPERATURE; WAVELENGTH REGIONS;

ELECTRIC CONDUCTIVITY; GALLIUM; GALLIUM ALLOYS; OPTIMIZATION; SUBSTRATES; THIN FILMS; ZINC OXIDE;

OPTICAL PROPERTIES;

EID: 84655162079     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.05.107     Document Type: Conference Paper

References (9)

1. K. Ellmer Resistivity of polycrystalline zinc oxide films: current status and physical limit Journal of Physics D: Applied Physics 34 2001 3097 3108 (Pubitemid 33120726)
2. V. Assuncao, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, R. Martins, and E. Fortunato Influence of the deposition pressure on the properties of transparent and conductive ZnO: Ga thin-film produced by r.f. sputtering at room temperature Thin Solid Films 427 2003 401 405
3. B.T. Lee, T.H. Kim, and S.H. Jeong Growth and characterization of single crystalline Ga-doped ZnO films using rf magnetron sputtering Journal of Physics D: Applied Physics 39 2006 957 961
4. P.A. Sánchez, T. Sintes, J.H.E. Cartwright, and O. Piro Influence of microstructure on the transitions between mesoscopic thin-film morphologies in ballistic-diffusive models Physical Review E 81 2010 011140
5. K. Jung, W.-K. Choi, S.-J. Yoon, H.J. Kim, and J.-W. Choi Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread Applied Surface Science 256 2010 6219 6223
6. J.A. Sans, J.F. Sánchez-Royo, V. Barber, M.A. Hernández- Fenollosa, B. Marí, and A. Segura Correlation between optical and transport properties of Ga-doped ZnO thin films prepared by pulsed laser deposition Superlattices and Microstructures 39 2006 282 290 (Pubitemid 43008427)
7. H.T. Cao, Z.L. Pei, J. Gong, C. Sun, R.F. Juang, and L.S. Wen Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering Surface and Coatings Technology 184 2004 84 92 (Pubitemid 38728550)
8. R.M. Ataev, A.M. Bagamadova, A.M. Djabrailov, V.V. Mamedov, and R.A. Rabadanov Highly conductive and transparent Ga-doped sapphire by CVD Thin Solid Films 260 1995 19 20
9. E. Burstein Anomalous Optical Absorption Limit in InSb Physical Review 93 1954 632 633