Nanostructures and sensing properties of ZnO prepared using normal and oblique angle deposition techniques

Thin Solid Films

Volumn 520, Issue 9, 2012, Pages 3493-3498

  Chu, Jin ^a   Peng, Xiaoyan ^a   Sajjad, M ^a   Yang, Boqian ^b   Feng, Peter X ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b UNIVERSITY OF MASSACHUSETTS   (United States)

Author keywords

Gas sensor; Nanorods; Oblique angle sputtering; Temperature; Zinc oxide

Indexed keywords

AVERAGE DIAMETER; C-AXIS ORIENTATIONS; CATALYST-FREE; DIFFERENT SUBSTRATES; EXPERIMENTAL DATA; FASTER RESPONSE AND RECOVERY TIME; GAS SENSING APPLICATIONS; HIGH SENSITIVITY; INCIDENT ANGLES; INCIDENT FLUX; ISLAND GROWTH MODE; LOW OPERATING TEMPERATURE; NANO-STRUCTURED; NANOROD ARRAYS; OBLIQUE ANGLES; OBLIQUE-ANGLE DEPOSITION; OBLIQUE-ANGLE SPUTTERING; PLASMA BEAM; RADIO FREQUENCY SPUTTERING; REPRODUCIBILITIES; SENSING PROPERTY; SILICON SUBSTRATES; SPUTTERING DEPOSITION; SYNTHESIS PROCESS; WURTZITE STRUCTURE; ZNO; ZNO NANOROD ARRAYS;

BEAM PLASMA INTERACTIONS; CHEMICAL MODIFICATION; CHEMICAL SENSORS; GAS DETECTORS; GRAIN BOUNDARIES; HYDROGEN; METHANE; NANOPARTICLES; SPUTTER DEPOSITION; TEMPERATURE; ZINC OXIDE; ZINC SULFIDE;

NANORODS;

EID: 84857366762     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.12.066     Document Type: Article

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