Morphology and interface characteristics of ZnO films deposited at room temperature and 750 °C

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5422-5426

  Liu, Z W ^a   Sun, C W ^a   Zhang, Q Y ^a   Wang, Y N ^a   Wu, B ^b   Jin, Z X ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

Growth; Interface; Magnetron sputtering; Morphology; ZnO films

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; DEPOSITION; MAGNETRON SPUTTERING; MORPHOLOGY;

DEVIATION ANGLE; INTERFACE CHARACTERISTICS;

ZINC OXIDE;

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; DEPOSITION; MAGNETRON SPUTTERING; MORPHOLOGY; ZINC OXIDE;

EID: 33846529924     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.049     Document Type: Article

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