Epitaxial growth of high-temperature ZnO layers on sapphire substrate by magnetron sputtering

Physica B: Condensed Matter

Volumn 401-402, Issue , 2007, Pages 408-412

  Kim, Young Yi ^a   Woo Kang, Si ^a   Kong, Bo Hyun ^a   Cho, Hyung Koun ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Epitaxial; Magnetron sputtering; Protrusion; ZnO

Indexed keywords

EPITAXIAL GROWTH; GROWTH TEMPERATURE; MAGNETRON SPUTTERING; OXYGEN VACANCIES; PHOTOLUMINESCENCE; SAPPHIRE; ZINC OXIDE;

DISLOCATION DENSITY; PYRAMIDAL-SHAPED PROTRUSIONS; TEMPERATURE RANGE;

THIN FILMS;

EID: 36049027159     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2007.08.199     Document Type: Article

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