Substrate temperature dependence of the properties of Ga-doped ZnO films deposited by DC reactive magnetron sputtering

Vacuum

Volumn 82, Issue 1, 2007, Pages 9-14

  Ma, Quan Bao ^a   Ye, Zhi Zhen ^a   He, Hai Ping ^a   Wang, Jing Rui ^a   Zhu, Li Ping ^a   Zhao, Bing Hui ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Electrical and optical properties; Magnetron sputtering; Transparent conductive oxide films; ZnO:Ga

Indexed keywords

MAGNETRON SPUTTERING; MORPHOLOGY; OPTICAL PROPERTIES; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE;

COLUMNAR STRUCTURE; TEMPERATURE DEPENDENCE; TRANSMITTANCE; TRANSPARENT CONDUCTIVE OXIDE FILMS;

CONDUCTIVE FILMS;

EID: 34548262570     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.12.010     Document Type: Article

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