Characteristics of reactively sputtered Pt-SnO2 thin films for CO gas sensors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2215-2219

  Di Giulio, M ^a   Micocci, G ^a   Serra, A ^a   Tepore, A ^a   Relia, R ^b   Siciliano, P ^b  

^a UNIVERSITY OF SALENTO   (Italy)

^b Istituto per lo Studio di Nuovi   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030519208     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580049     Document Type: Article

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