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Volumn 82, Issue 4, 2011, Pages
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A novel compact design of calibration equipment for gas and thermal sensors
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Author keywords
[No Author keywords available]
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Indexed keywords
CALIBRATION EQUIPMENT;
COMPACT DESIGNS;
ECONOMICAL METHODS;
GAS FLOWRATE;
NOVEL DESIGN;
OPERATING TEMPERATURE;
PLASMA SURFACE MODIFICATIONS;
STATIC AND DYNAMIC;
SURFACE MODIFICATION;
THERMAL SENSORS;
EQUIPMENT;
GASES;
SENSORS;
CALIBRATION;
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EID: 79955571990
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3581207 Document Type: Article |
Times cited : (13)
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References (10)
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