Influence of substrate temperature on the orientation and optical properties of sputtered ZnO films

Materials Letters

Volumn 57, Issue 30, 2003, Pages 4655-4659

  Li, X H ^a   Huang, A P ^a   Zhu, M K ^a   Xu, Sh L ^a   Chen, J ^a   Wang, H ^a   Wang, B ^a   Yan, H ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Photoluminescence; Sputtering; Substrate temperature; ZnO film

Indexed keywords

PHOTOLUMINESCENCE; SPUTTERING; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

INTRINSIC EMISSION;

SEMICONDUCTING FILMS;

EID: 0142216163     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(03)00379-3     Document Type: Article

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