Thin film microstructure control using glancing angle deposition by sputtering

Journal of Materials Research

Volumn 14, Issue 4, 1999, Pages 1197-1199

  Sit, J C ^a   Vick, D ^a   Robbie, K ^a   Brett, M J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; FILM PREPARATION; METALLIC FILMS; MICROSTRUCTURE; POROUS MATERIALS; PROCESS CONTROL; SPUTTER DEPOSITION; TITANIUM;

GLANCING ANGLE DEPOSITION; OBLIQUE ANGLE EVAPORATION;

THIN FILMS;

EID: 0032653958     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0162     Document Type: Article

References (17)

1. H. Konig and G. Helwig, Optik (Stuttgart) 6, 111 (1950).
2. H. van Kranenburg and J. C. Lodder, Mater. Sci. Eng. R. Rep. 11, 293 (1994).
3. L. Abelmann and C. Lodder, Thin Solid Films 305, 1 (1997).
4. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).
5. K. Robbie, M.J. Brett, and A. Lakhtakia, Nature (London) 384, 616 (1996).
6. P.I. Rovira, R.A. Yarussi, R.W. Collins, R. Messier, V.C. Venugopal, A. Lakhtakia, K. Robbie, and M. J. Brett, Appl. Phys. Lett. 71, 1180-1183 (1997).
7. K. Robbie, L.J. Friedrich, S. K. Dew, T. Smy, and M.J. Brett, J. Vac Sci. Technol. A 13, 1032 (1995).
8. R. Messier, T. Gehrke, C. Frankel, V. C. Venugopal, W. Otaño, and A. Lakhtakia, J. Vac. Sci. Technol. A 15, 2148 (1997).
9. K. Robbie, J. C. Sit, and M.J. Brett, J. Vac. Sci. Technol. B 16, 1115 (1998).
10. K. Robbie, A. J. P. Hnatiw, M.J. Brett, R. I. MacDonald, and J. N. McMullin, Electron. Lett. 33, 1213 (1997).
11. R. N. Tait, T. Smy, and M.J. Brett, Thin Solid Films 226, 196 (1993).
12. R. N. Tait, S. K. Dew, W. Tsai, D. Hodul, T. Smy, and M.J. Brett, J. Vac. Sci. Technol. B 14, 679 (1996).
13. S. M. Rossnagel, D. Mikalsen, H. Kinoshita, and J.J. Cuomo, J. Vac. Sci. Technol. A 9, 261 (1991).
14. S. M. Rossnagel and J. Hopwood, Appl. Phys. Lett. 63, 3285 (1993).
15. J. N. Broughton, M. J. Brett, S. K. Dew, and G. Este, IEEE Trans. Semicon. Manufact. 9, 122 (1996).
16. K. Robbie, M.J. Brett, and Lakhtakia, J. Vac. Sci. Technol. A 13, 2991 (1995).
17. S. K. Dew, T. Smy, and M. J. Brett, Jpn. J. Appl. Phys. 33, 1140 (1994).