Optical and electrical properties of SnO 2 :Sb thin films deposited by oblique angle deposition

Applied Surface Science

Volumn 256, Issue 6, 2010, Pages 1636-1640

  Xiao, Xiudi ^a,b   Dong, Guoping ^a,b   Shao, Jianda ^a   He, Hongbo ^a   Fan, Zhengxiu ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Anisotropy; Optical spectroscopy; Physical vapor deposition; Thin films

Indexed keywords

ANISOTROPY; ANTIMONY COMPOUNDS; CONDUCTIVE FILMS; FIELD EMISSION MICROSCOPES; LIQUID CRYSTAL DISPLAYS; NANOCOMPOSITES; OXIDE FILMS; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SHEET RESISTANCE; SILICA; THIN FILM SOLAR CELLS; TIN OXIDES; X RAY DIFFRACTION;

ELECTRON BEAM EVAPORATION; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; MULTIFUNCTIONAL CARRIERS; OBLIQUE-ANGLE DEPOSITION; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL SPECTROSCOPY; TRANSPARENT CONDUCTIVE THIN FILMS; UV-VIS-NIR SPECTROPHOTOMETERS;

THIN FILMS;

EID: 72549115995     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.09.084     Document Type: Article

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