Constraint-based design of parallel kinematic XY flexure mechanisms

Journal of Mechanical Design

Volumn 129, Issue 8, 2007, Pages 816-830

  Awtar, Shorya ^a   Slocum, Alexander H ^a,b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Center of stiffness; Constraint based flexure design; Flexure design tradeoffs; Flexure performance characteristics; Nonlinear flexure analysis; XY flexure

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTATIONAL METHODS; CONSTRAINT THEORY; FINITE ELEMENT METHOD; KINEMATICS; NONLINEAR ANALYSIS;

CONSTRAINT-BASED FLEXURE DESIGN; FLEXURE DESIGN TRADEOFFS; FLEXURE MECHANISMS; NONLINEAR FLEXURE ANALYSIS; PARALLEL KINEMATICS;

MECHANISMS;

EID: 34548204254     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2735342     Document Type: Article

References (21)

1. Ryu, J. W., Gweon, D.-G., and Moon, K. S., 1997, "Optimal Design of a Flexure Hinge Based X-Y-θ Wafer Stage," Precis. Eng., 21(1), pp. 18-28.
2. Smith, A. R., Gwo, S., and Shih, C. K., 1994, "A New High Resolution Two-Dimensional Micropositioning Device for Scanning Probe Microscopy," Rev. Sci. Instrum., 64(10), pp. 3216-3219.
3. Eom, T. B., and Kim, J. Y., 2001, "Long Range Stage for the Metrological Atomic Force Microscope," Proceedings ASPE 2001 Annual Meeting, pp. 156-159.
4. Gorman, J. J., and Dagalakis, N. G., 2003, "Force Control of Linear Motor Stages for Microassembly," ASME International Mechanical Engineering Conference and Exposition, Washington, DC, ASME Paper No. IMECE2003-42079.
5. Vettiger, P., Despont, M., Drechsler, U., Durig, U., Haberle, W., Lutwyche, M. I., Rothutizen, H. E., Stutz, R., Widmer, R., and Binnig, G. K., 2000, "The Millipede - More Than One Thousand Tips for Future AFM Data Storage," IBM J. Res. Dev., 44(3), pp. 323-340.
6. ADXL Accelerometers and ADXRS Gyroscopes, www.analogdevices.com
7. Agilent Nanostepper J7220, www.labs.agilent.com
8. XY Nanopositioner P-733, www.physikinstrumente.com
9. Z Piezo-Micropositioner Part I: Design and Analysis," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 46(4), pp. 897-905.
10. Chen, K. S., Trumpet, D. L., and Smith, S. T., 2002, "Design and Control for an Electromagnetically Driven X-Y-θ Stage," J. of Precision Eng. and Nano-technol., 26, pp. 355-369.
11. Awtar, S., 2004, "Analysis and Synthesis of Planer Kinematic XY Mechanisms," Sc.D. thesis, Massachusetts Institute of Technology, Cambridge, MA, http://web.mit.edu/shorya/www
12. Awtar, S., and Slocum, A. H., 2005, "Closed-Form Nonlinear Analysis of Beam-Based Flexure Modules," Proceedings ASME IDETC/CIE 2005, Long Beach, CA, ASME, New York, ASME Paper No. 85440.
13. Ananthasuresh, G. K., Kota, S., and Gianchandani, Y., 1994, "A Methodical Approach to Design of Compliant Micromechanisms," Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 189-192.
14. Frecker, M. I., Ananthasuresh, G. K., Nishiwaki, S., Kickuchi, N., and Kota, S., 1997, "Topological Synthesis of Compliant Mechanisms Using Multi-Criteria Optimization," ASME J. Mech. Des., 119, pp. 238-245.
15. Blanding, D. K., 1999, Exact Constraint: Machine Design Using Kinematic Principles, ASME, New York.
16. Awtar, S., and Slocum, A. H., 2004, "Apparatus Having Motion With Pre-Determined Degree of Freedom," U.S. Patent 6,688,183 B2.
17. Bisshopp, K. E., and Drucker, D. C., 1945, "Large Defection of Cantilever Beams," Q. Appl. Math., 3(3), pp. 272-275.
18. Howell, L. L., 2001, Compliant Mechanisms, Wiley, New York.
19. Plainevaux, J. E., 1956, "Etude des deformations d'une lame de suspension elastique," Nuovo Cimento, 4, pp. 922-928.
20. Legtenberg, R., Groeneveld, A. W., and Elwenspoek, M., 1996, "Comb-Drive Actuators for Large Displacements," J. Micromech. Microeng., 6, pp. 320-329.
21. Saggere, L., Kota, S., and Crary, S. B., 1994, "A New Design for Suspension of Linear Microactuators, DSC-Vol. 55-2, Dynamic Systems and Control, Vol. 2, Proceedings 1994 International Mechanical Engineering Congress and Exposition, Chicago, IL, Nov. 6-11, pp. 671-675.