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Volumn 164-165, Issue , 2005, Pages 1584-1589
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A mathematical approach for analyzing ultra precision positioning system with compliant mechanism
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Author keywords
Compliant mechanism; Flexure hinge; Mathematical model; Multiple axis; Ultra precision
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Indexed keywords
ACOUSTIC NOISE;
ACTUATORS;
BENDING STRENGTH;
DEGREES OF FREEDOM (MECHANICS);
ERROR ANALYSIS;
HINGES;
MATHEMATICAL MODELS;
STIFFNESS MATRIX;
COMPLIANT MECHANISMS;
COMPUTER SIMULATION;
MECHANICAL ENGINEERING;
PIEZOELECTRIC ACTUATORS;
COMPLIANT MECHANISM;
FLEXURE HINGE;
SYMMETRIC STRUCTURE;
ULTRA PRECISION POSITIONING SYSTEM;
PRECISION ENGINEERING;
MECHANISMS;
FLEXURE HINGE;
LEAST ACTION PRINCIPLE;
MATHEMATICAL APPROACH;
MULTIPLE-AXIS;
RELATIVE DISPLACEMENT;
THREE-DIMENSIONAL MODELING;
ULTRA PRECISION;
ULTRA PRECISION POSITIONING SYSTEM;
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EID: 17844402728
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmatprotec.2005.02.018 Document Type: Article |
Times cited : (44)
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References (11)
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