Exppen accessatomic characterization of si nanoclusters embedded in sio2 by atom probe tomography

Nanoscale Research Letters

Volumn 6, Issue 1, 2011, Pages

  Roussel, Manuel ^a   Talbot, Etienne ^a   Gourbilleau, Fabrice ^b   Pareige, Philippe ^a  

^a UNIVERSITÉ ET INSA DE ROUEN   (France)

^b UNIVERSITÉ DE CAEN   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DIGITAL STORAGE; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICROELECTRONICS; MULTILAYERS; NANOCLUSTERS; PROBES; SILICA; SILICON OXIDES; SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

ATOM PROBE ANALYSIS; ATOM PROBE TOMOGRAPHY; ATOMIC-SCALE DESCRIPTION; COMPLEMENTARY TECHNIQUES; NANOSTRUCTURAL CHARACTERISTICS; SAMPLE PREPARATION; SILICON CLUSTERS; SILICON NANOCLUSTERS; ANALYTIC METHOD; ATOMIC LEVELS; CARRIER STORAGE; DATA TREATMENT; HIGH RESOLUTION; SI NANOCLUSTER;

CRYSTAL ATOMIC STRUCTURE;

EID: 84255173209     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-164     Document Type: Article

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