Some aspects of atom probe specimen preparation and analysis of thin film materials

Ultramicroscopy

Volumn 100, Issue 1-2, 2004, Pages 25-34

  Thompson, G B ^a   Miller, M K ^b   Fraser, H L ^c  

^a University of Alabama   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c The Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; ION BEAMS; MULTILAYERS; SPECIMEN PREPARATION; SPUTTERING; THIN FILMS;

ATOM PROBE SPECIMEN PREPARATION; METALLIC MULTILAYER THIN FILMS;

MICROSCOPIC EXAMINATION;

COPPER; GALLIUM; ION; NIOBIUM; PLUTONIUM; SILICON; TITANIUM;

ANALYTIC METHOD; ARTICLE; ATOM; CHEMICAL COMPOSITION; FILM; GEOMETRY; MASS SPECTROMETRY;

MASS SPECTROMETRY; METALS; MICROSCOPY, ELECTRON; MOTION PICTURES; NANOTECHNOLOGY; SPECIMEN HANDLING;

EID: 2442602783     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.01.010     Document Type: Article

References (28)

1. Bauer E.G., Dodson B.W., Ehrlich D.J., Feldman L.C., Flynn C.P., Geis M.W., Harbison J.P., Matyi R.J., Peercy P.S., Petroff P.M., Phillips J.M., Stringfellow G.B., Zangwill A. J. Mater. Res. 5(4):1990;852
2. Wormeester H., Huger E., Bauer E. Phys. Rev. Lett. 77(8):1996;1540
3. Rozatian A.S.H., Fulthorpe B.D., Hase T.P.A., Read D.E., Ashcroft G., Joyce D.E., Grundy P.J., Amighian J., Tanner B.K. J. Magn. Magn. Mater. 256:2003;365
4. Shen J., Kirschner J. Surf. Sci. 500:2002;300
5. Prinz G.A. J. Magn. Magn. Mater. 100:1991;469
6. Wang A.Q., Lu S.H., Li Y.S., Fona F. Phys. Rev. B. 35(17):1987;9322
7. Idzerda Y.U., Elam W.T., Jonker B.T., Prinz G.A. Phys. Rev. Lett. 62(21):1989;2480
8. Thompson G.B., Banerjee R., Dregia S.A., Miller M.K., Fraser H.L. J. Mater. Res. 19(3):2004;707
9. Dregia S.A., Banerjee R., Fraser H.L. Scr. Mater. 39(2):1998;217
10. D.A. Porter, K.E. Easterling, Phase Transformations in Metals Alloys, 2nd Edition, Chapman & Hall, New York, NY, 1992, p. 142.
11. Tromp R.M., Ross F.M. Ann. Rev. Mater. Sci. 30:2000;431
12. Suzuki T., Wakabayashi H., Nishi Y., Fujimoto M. J. Ceram. Soc. Japan. 110(2):2002;86
13. Han K., Yu-Zhang K. Philos. Mag. B. 79(6):1999;897
14. Larson D.J., Foord D.T., Petford-Long A.K., Anthony T.C., Rozdilsky I.M., Cerezo A., Smith G.W.D. Ultramicroscopy. 75:1998;147
15. Larson D.J., Foord D.T., Petford-Long A.K., Liew H., Blamire M.G., Cerezo A., Smith G.W.D. Ultramicroscopy. 79:1999;287
16. Larson D.J., Petford-Long A.K., Cerezo A., Smith G.W.D. Acta Mater. 47(15-16):1999;4019
17. Martens R.L., Larson D.J., Kelly T.F., Cerezo A., Clifton P.H., Tabat N. Microsc. Microanal. Proc. 6:2000;522
18. Larson D.J., Wissman B.D., Viellieux R.J., Martens R.L., Gribb T.T., Erskine H.F., Kelly T.F., Tabat N. Microsc. Microanal. 7:2001;24
19. Sijbrandij S.J., Larson D.J., Miller M.K. Microsc. Microanal. 4:1998;90
20. Ayon A.A., Braff R., Lin C.C., Swaim H.H., Schmidt M.A. J. Electrochem. Soc. 146:1999;339
21. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Matter. 1985;Pergamon Press, New York, NY
22. Prenitzer B.I., Urbanik-Shannon C.A., Giannuzzi L.A., Brown S.R., Irwin R.B., Shofner T.L., Stevie F.A. Microsc. Microanal. 9:2003;216
23. Miller M.K. Atom Probe Tomography Analysis at the Atomic Level. 2000;Kluwer Academic Plenum Publishers, New York
24. Bonevich J., van Heerden D., Josell D. J. Mater. Res. 14(5):1999;1977
25. Banerjee R., Dregia S.A., Fraser H.L. Acta Mater. 47(15):1999;4225
26. Tepper T., Schechtman D., van Heerden D., Josell D. Mater. Lett. 35:1998;100
27. F. Vurpillot, A. Cerezo, D. Blavette, D.J. Larson, Modeling image distortions in 3DAP, Microsc. Microanal., in press.
28. F. Vurpillot, D.J. Larson, A. Cerezo, Surf. Interf. Anal., in press.