Atom probe tomography of swift ion irradiated multilayers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 6, 2009, Pages 912-916

  Juraszek, J ^a   Grenier, A ^a   Teillet, J ^a   Cadel, E ^a   Tiercelin, N ^b   Monnet, I ^c   Toulemonde, M ^c  

^a UNIVERSITÉ DE ROUEN   (France)

^b INSTITUT D ELECTRONIQUE   (France)

^c Direction de la Recherche Fondamentale   (France)

Author keywords

42.30.Wb; 61.80.Jh; 68.55.Nq; 68.65.Ac; Atom probe tomography; Ion beam mixing; Multilayers; Swift ion irradiation

Indexed keywords

42.30.WB; 61.80.JH; 68.55.NQ; 68.65.AC; ATOM PROBE TOMOGRAPHY; ION BEAM MIXING; SWIFT ION IRRADIATION;

ATOMS; ION BEAMS; IONS; IRRADIATION; LEAD; MIXING; PROBES; THREE DIMENSIONAL; TOMOGRAPHY;

MULTILAYERS;

EID: 69749115740     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.02.036     Document Type: Article

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