Piezoresistivity of polycrystalline silicon applying the AIC process-route

Sensors and Actuators, A: Physical

Volumn 172, Issue 2, 2011, Pages 447-454

  Uhlig, Steffen ^a   Rau, Stephan ^a   Schultes, Günter ^a  

^a Saarland University of Applied Sciences   (Germany)

Author keywords

Aluminum induced crystallization; Low temperature process; Piezoresistance; Polycrystalline silicon; Strain gauge; Strain sensitivity; Thin film

Indexed keywords

ALUMINUM-INDUCED CRYSTALLIZATION; LOW-TEMPERATURE PROCESS; PIEZORESISTANCE; POLY-CRYSTALLINE SILICON; STRAIN GAUGE; STRAIN SENSITIVITY;

ALUMINUM; ANNEALING; HIGH TEMPERATURE APPLICATIONS; POLYSILICON; THIN FILMS; VACUUM;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 82955203157     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.09.031     Document Type: Article

References (43)

1. Barlian A., Park W.T., Mallon J., Rastegar A., and Pruitt B. Review: Semiconductor piezoresistance for microsystems Proceedings of the IEEE 97 3 2009 513 552
2. Schultes G., Frey P., Goettel D., and Freitag-Weber O. Strain sensitivity of nickel-containing amorphous hydrogenated carbon (Ni:a-C:H) thin films prepared by r.f. sputtering using substrate bias conditions Diamond and Related Materials 15 1 2006 80 89 (Pubitemid 41814594)
3. Koppert R., Goettel D., Freitag-Weber O., and Schultes G. Nickel containing diamond like carbon thin films Solid State Sciences 11 10 2009 1797 1800
4. Hrovat M., Holc J., Belavič D., and Šoba S. A possible way to increase the gauge factors of thick film resistors Journal of Materials Science Letters 14 1995 584 586
5. French P., and Evans A. Polycrystalline silicon strain sensors Sensors and Actuators 8 3 1985 219 225
6. French P., and Evans A. Piezoresistance in polysilicon and its applications to strain gauges Solid-State Electronics 32 1 1989 1 10 (Pubitemid 20609251)
7. Schäfer H., Graeger V., and Kobs R. Temperature-independent pressure sensors using polycrystalline silicon strain gauges Sensors and Actuators 17 3-4 1989 521 527
8. Alpuim P., Andrade M., Sencadas V., Ribeiro M., Filonovich S., and Lanceros-Mendez S. Piezoresistive properties of nanocrystalline silicon thin films deposited on plastic substrates by hot-wire chemical vapor deposition Thin Solid Films 515 19 2007 7658 7661 (Pubitemid 47198728)
9. Alpuim P., Filonovich S., Costa C., Rocha P., Vasilevskiy M., and Lanceros-Mendez S. Fabrication of a strain sensor for bone implant failure detection based on piezoresistive doped nanocrystalline silicon Journal of Non-Crystalline Solids 354 19-25 2008 2585 2589
10. Liu X., Lu X., Chuai R., Shi C., and Suo C. Polysilicon nanofilm pressure sensor Sensors and Actuators A: Physical 154 1 2009 42 45
11. Wang M., Meng Z., Zohar Y., and Wong M. Metal-induced laterally crystallized polycrystalline silicon for integrated sensor applications IEEE Transactions on Electron Devices 48 2001 794 800 (Pubitemid 32372243)
12. Shi C., Liu X., and Chuai R. Piezoresistive sensitivity, linearity and resistance time drift of polysilicon nanofilms with different deposition temperatures Sensors 9 2 2009 1141 1166
13. Shi C., Liu X., and Chuai R. Current-induced recrystallization of polycrystalline silicon nano thin films deposited at different temperatures and its influences on piezoresistive sensitivity and temperature coefficients Sensors and Actuators A: Physical 162 2 2010 284 290 Eurosensors XXIII, 2009
14. Kanda Y. Piezoresistance effect of silicon Sensors and Actuators A: Physical 28 2 1991 83 91 (Pubitemid 21713166)
15. Alpuim P., Marins E., Rocha P., Trindade I., Carvalho M., and Lanceros-Mendez S. Ultra-sensitive shape sensor test structures based on piezoresistive doped nanocrystalline silicon Vacuum 83 10 2009 1279 1282
16. Knaepen W., Detavernier C., Meirhaeghe R.V., Sweet J.J., and Lavoie C. In-situ X-ray diffraction study of metal induced crystallization of amorphous silicon Thin Solid Films 516 15 2008 4946 4952 (Pubitemid 351601828)
17. Robertson A., Hultman L., Hentzell H., Hörnström S., Shaofang G., and Psaras P. Metal induced crystallization of amorphous silicon Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 5 1987 1447
18. O. Nast, The aluminium-induced layer exchange forming polycrystalline silicon on glass for thin-film solar cells, Ph.D. Thesis, Philipps- Universität Marburg, 2000.
19. Lee S., Jeon Y., and Joo S. Pd induced lateral crystallization of amorphous Si thin films Applied Physics Letters 66 1995 1671 1673
20. Hultman L., Robertsson A., Hentzell H., Engström I., and Psaras P. Crystallization of amorphous silicon during thin-film gold reaction Journal of Applied Physics 62 1987 3647
21. Bokhonov B., and Korchagin M. In-situ investigation of the formation of nickel silicides during interaction of single-crystalline and amorphous silicon with nickel Journal of Alloys and Compounds 319 1-2 2001 187 195 (Pubitemid 32279410)
22. Bokhonov B., and Korchagin M. In-situ investigation of the formation of eutectic alloys in the systems silicon-silver and silicon-copper Journal of Alloys and Compounds 335 1-2 2002 149 156 (Pubitemid 34162284)
23. Massalski T.B. Binary Alloy Phase Diagrams 2nd ed. 1990 ASM International
24. Nast O., and Wenham S.R. Elucidation of the layer exchange mechanism in the formation of polycrystalline silicon by aluminum-induced crystallization Journal of Applied Physics 88 1 2000 124 132
25. Wang J., Wang Z., Jeurgens L., and Mittemeijer E. Mechanisms of aluminium-induced crystallization and layer exchange upon low-temperature annealing of amorphous si/polycrystalline al bilayers Journal of Nanoscience and Nanotechnology 9 2009 3364 3371
26. Gall S., Becker C., Conrad E., Dogan P., Fenske F., and Gorka B. Polycrystalline silicon thin-film solar cells on glass Solar Energy Materials and Solar Cells 93 6-7 2009 1004 1008
27. Gall S., Schneider J., Klein J., Hübener K., Muske M., and Rau B. Large-grained polycrystalline silicon on glass for thin-film solar cells Thin Solid Films 511-512 2006 7 14 (Pubitemid 44250835)
28. Alford T., Shetty P., Theodore N., Tile N., Adams D., and Mayer J. Nanocrystalline Si formation in the a-Si/Al system on polyimide and silicon dioxide substrates Thin Solid Films 516 12 2008 3940 3947 (Pubitemid 351381140)
29. He D., Wang J.Y., and Mittemeijer E.J. The initial stage of the reaction between amorphous silicon and crystalline aluminum Journal of Applied Physics 97 9 2005 093524 (pages 9)
30. Wang J.Y., Zalar A., and Mittemeijer E.J. Depth dependences of the ion bombardment induced roughness and of the interdiffusion coefficient for Si/Al multilayers Applied Surface Science 222 1-4 2004 171 179
31. Gall S., Muske M., Sieber I., Nast O., and Fuhs W. Aluminum-induced crystallization of amorphous silicon Journal of Non-Crystalline Solids 299-302 Part 2 2002 741 745 (Pubitemid 34405801)
32. Schneider J., Heimburger R., Klein J., Muske M., Gall S., and Fuhs W. Aluminum-induced crystallization of amorphous silicon: influence of temperature profiles Thin Solid Films 487 1-2 2005 107 112 (Pubitemid 41042552)
33. Ekanayake G., Quinn T., and Reehal H. Large-grained poly-silicon thin films by aluminium-induced crystallisation of microcrystalline silicon Journal of Crystal Growth 293 2 2006 351 358 (Pubitemid 44144480)
34. Patil S., elik-Butler Z., and Butler D. Microcrystalline piezoresistive polysilicon film obtained by aluminum induced crystallization 8th IEEE Conference on Nanotechnology Arlington, TX, USA 2008 767 770
35. Patil S.K., elik-Butler Z., and Butler D.P. Characterization of mems piezoresistive pressure sensors using afm Ultramicroscopy 110 9 2010 1154 1160
36. Patil S.K., elik-Butler Z., and Butler D.P. Piezoresistive polysilicon film obtained by low-temperature aluminum-induced crystallization Thin Solid Films 519 1 2010 479 486
37. Patterson A.L. The Scherrer formula for X-Ray particle size determination Physical Review 56 10 1939 978 982
38. He D., Wang J., and Mittemeijer E. Reaction between amorphous Si and crystalline Al in Al/Si and Si/Al bilayers: microstructural and thermodynamic analysis of layer exchange Applied Physics A: Materials Science & Processing 80 2005 501 509 (Pubitemid 40003095)
39. He D., Wang J., and Mittemeijer E. Origins of interdiffusion, crystallization and layer exchange in crystalline Al/amorphous Si layer systems Applied Surface Science 252 15 2006 5470 5473 (Pubitemid 43817220)
40. Haque M.S., Naseem H.A., and Brown W.D. Aluminum-induced crystallization and counter-doping of phosphorous-doped hydrogenated amorphous silicon at low temperatures Journal of Applied Physics 79 10 1996 7529 7536 (Pubitemid 126626105)
41. Zhao Y.H., Wang J.Y., and Mittemeijer E.J. Interaction of amorphous Si and crystalline Al thin films during low-temperature annealing in vacuum Thin Solid Films 433 1-2 2003 82 87
42. Klein J., Schneider J., Muske M., Gall S., and Fuhs W. Aluminium-induced crystallisation of amorphous silicon: influence of the aluminium layer on the process Thin Solid Films 451-452 2004 481 484
43. Widenborg P.I., and Aberle A.G. Surface morphology of poly-Si films made by aluminium-induced crystallisation on glass substrates Journal of Crystal Growth 242 3-4 2002 270 282 (Pubitemid 34732212)