Piezoresistive properties of nanocrystalline silicon thin films deposited on plastic substrates by hot-wire chemical vapor deposition

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7658-7661

  Alpuim, P ^a   Andrade, M ^a   Sencadas, V ^a   Ribeiro, M ^a   Filonovich, S A ^a   Lanceros Mendez, S ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

Flexible electronics; Hot wire chemical vapor deposition; Nanocrystalline silicon; Piezoresistivity

Indexed keywords

CHEMICAL VAPOR DEPOSITION; PIEZOELECTRIC MATERIALS; PLASTICS; THIN FILMS;

FLEXIBLE ELECTRONICS; HOT-WIRE CHEMICAL VAPOR DEPOSITION; PIEZORESISTIVITY;

NANOCRYSTALLINE SILICON;

EID: 34547593479     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.138     Document Type: Article

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