Ultra-sensitive shape sensor test structures based on piezoresistive doped nanocrystalline silicon

Vacuum

Volumn 83, Issue 10, 2009, Pages 1279-1282

  Alpuim, P ^a   Marins, E S ^a   Rocha, P F ^a   Trindade, I G ^b   Carvalho, M A ^a   Lanceros Mendez, S ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF PORTO   (Portugal)

Author keywords

Flexible electronics; Piezoresistance; Plastic; Sensor; Silicon; Thin film

Indexed keywords

CONDUCTIVE THREADS; ELECTRICAL OUTPUT SIGNALS; ELECTRONIC TEXTILES; FLEXIBLE ELECTRONICS; FLEXIBLE POLYIMIDE SUBSTRATE; FULL-BRIDGE; HOT WIRE CHEMICAL VAPOR DEPOSITION; HYDROGENATED NANOCRYSTALLINE SILICON; NC-SI:H; OUTPUT RESPONSE; OUTPUT VOLTAGES; PIEZO-RESISTIVE; PIEZORESISTANCE; PIEZORESISTIVE GAUGE FACTOR; PIEZORESISTIVE SENSORS; PIEZORESISTOR; RANDOM LOADING; RECTANGULAR PLATES; SENSOR TESTS; STRAIN DATA; STRAIN SENSING; TEST STRUCTURE; THICK MEMBRANES; WHEATSTONE BRIDGE CIRCUITS;

BRIDGE CIRCUITS; GLUING; NANOCRYSTALLINE SILICON; PLATES (STRUCTURAL COMPONENTS); POLYIMIDES; TEXTILE PROCESSING; THIN FILM DEVICES;

SENSORS;

EID: 67349234535     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.03.031     Document Type: Article

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