Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39nm structures

Ultramicroscopy

Volumn 111, Issue 12, 2011, Pages 1706-1711

  Mayer, M ^a   Grevent C ^a   Szeghalmi, A ^b   Knez, M ^b   Weigand, M ^a   Rehbein, S ^c   Schneider, G ^c   Baretzky, B ^d   Schutz G ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^c HAHN MEITNER INSTITUT   (Germany)

^d KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Atomic layer deposition; Focused ion beam; Fresnel zone plate; Multilayer Fresnel zone plate; X ray microscopy

Indexed keywords

DIFFRACTIVE LENS; FRESNEL ZONE PLATE; FUNDAMENTAL LIMITATIONS; HARD X RAY; HIGH POTENTIAL; HIGH-RESOLUTION MICROSCOPY; MANUFACTURING TECHNIQUES; MULTILAYER DEPOSITIONS; RESOLVING FEATURES; SOFT X-RAY; SOFT X-RAY MICROSCOPY; SOFT X-RAY RANGE; X RAY MICROSCOPY; X-RAY FOCUSING;

ATOMIC LAYER DEPOSITION; FOCUSED ION BEAMS; PLATES (STRUCTURAL COMPONENTS); X RAY MICROSCOPES; X RAYS;

MULTILAYERS;

ARTICLE; ATOMIC LAYER DEPOSITION; FOCUSED ION BEAM; LABORATORY DEVICE; MICROSCOPE; MICROSCOPY; MULTILAYER DEPOSITION; MULTILAYER FRESNEL ZONE PLATE; NANOFABRICATION; PHYSICAL PARAMETERS; RADIATION BEAM; ROENTGEN MICROSCOPY; SCANNING SOFT X RAY MICROSCOPE;

EID: 81055137646     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2011.09.003     Document Type: Article

References (49)

1. Emma P., Akre R., Arthur J., Bionta R., Bostedt C., et al. First lasing and operation of an angstrom-wavelength free-electron laser. Nature Photonics 2010, 4:641-647.
2. Jansson P., Vogt U., Hertz H. Liquid-nitrogen-jet laser-plasma source for compact soft X-ray microscopy. Review of Scientific Instruments 2005, 76.
3. Chen M., Arpin P., Popmintchev T., Gerrity M., Zhang B., et al. Bright, coherent, ultrafast soft X-ray harmonics spanning the water window from a tabletop light source. Physical Review Letters 2010, 105.
4. J. Park, D. Kim, S. Jeon, K. Lee, J. Lee, et al., Table-top soft X-ray microscope adopting a PMMA phase-reversal zone plate, in: 2009 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference (CLEO/QELS 2009), vols. 1-5, 2009, pp. 2460-2461.
5. Wiederrecht G. Handbook of Nanofabrication 2009, Academic Press.
6. Smith H., Menon R., Patel A., Chao D., Walsh M., Barbastathis G. Zone-plate-array lithography: a low-cost complement or competitor to scanning-electron-beam lithography. Microelectronic Engineering 2006, 83:956-961.
7. Ade H., Stoll H. Near-edge X-ray absorption fine-structure microscopy of organic and magnetic materials. Nature Materials 2009, 8:281-290.
8. Kirz J., Jacobsen C., Howells M. Soft-X-ray microscopes and their biological applications. Quarterly Reviews of Biophysics 1995, 28:33-130.
9. Yoon T. Applications of soft X-ray spectromicroscopy in material and environmental sciences. Applied Spectroscopy Reviews 2009, 44:91-122.
10. Schneider G. X-ray microscopy: methods and perspectives. Analytical and Bioanalytical Chemistry 2003, 376:558-561.
11. Thieme J., Sedlmair J., Gleber S., Prietzel J., Coates J., et al. X-ray spectromicroscopy in soil and environmental sciences. Journal of Synchrotron Radiation 2010, 17:149-157.
12. Grunwaldt J., Schroer C. Hard and soft X-ray microscopy and tomography in catalysis: bridging the different time and length scales. Chemical Society Reviews 2010, 39:4741-4753.
13. Erko A., Zizak I. Hard X-ray micro-spectroscopy at Berliner Elektronenspeicherring für Synchrotronstrahlung II. Spectrochimica Acta Part B, Atomic Spectroscopy 2009, 64:833-848.
14. Salome M., Bleuet P., Bohic S., Cauzid J., Chalmin E., et al. Fluorescence X-ray micro-spectroscopy activities at ESRF. Ninth International Conference on X-ray Microscopy 2009, vol. 186.
15. Bressler C., Chergui M. Ultrafast X-ray absorption spectroscopy. Chemical Reviews 2004, 104:1781-1812.
16. Barty A. Time-resolved imaging using X-ray free electron lasers. Journal of Physics B, Atomic, Molecular and Optical Physics 2010, 43.
17. Saes M., Bressler C., Abela R., Grolimund D., Johnson S., et al. Observing photochemical transients by ultrafast X-ray absorption spectroscopy. Physical Review Letters 2003, 90.
18. Stoll H., Puzic A., van Waeyenberge B., Fischer P., Raabe J., et al. High-resolution imaging of fast magnetization dynamics in magnetic nanostructures. Applied Physics Letters 2004, 84:3328-3330.
19. D.T. Attwood, Soft X-rays and Extreme Ultraviolet Radiation-Principles and Applications, Cambridge University Press, pp. 337-394.
20. Chao W., Harteneck B., Liddle J., Anderson E., Attwood D. Soft X-ray microscopy at a spatial resolution better than 15nm. Nature 2005, 435:1210-1213.
21. Jefimovs K., Vila-Comamala J., Pilvi T., Raabe J., Ritala M., David C. Zone-doubling technique to produce ultrahigh-resolution X-ray optics. Physical Review Letters 2007, 99:264801.
22. Rehbein S., Heim S., Guttmann P., Werner S., Schneider G. Ultrahigh-resolution soft-X-ray microscopy with zone plates in high orders of diffraction. Physical Review Letters 2009, 103:110801.
23. Vila-Comamala J., Jefimovs K., Raabe J., Pilvi T., Fink R., Senoner M., Dorf A.M., Ritala M., David C. Advanced thin film technology for ultrahigh resolution X-ray microscopy. Ultramicroscopy 2009, 109:1360-1364.
24. D. Rudolph, G. Schmahl, High power zone plates for a soft X-ray microscope, in: D.F. Parsons (Ed.), Annals of the New York Academy of Sciences, vol. 342, Ultrasoft X-ray Microscopy: Its Application to Biological and Physical Sciences; Meeting, June 13-15, 1979,. VIII+402P. New York, NY, USA, Illus, New York Academy of Sciences, 1980, pp. 94-104.
25. Rudolph D., Niemann B., Schmahl G. Status of the sputtered sliced zone plates for X-ray microscopy. Proceedings of the Society of Photo-Optical Instrumentation Engineers 1981, 316:103-105.
26. Bionta R., Ables E., Clamp O., Edwards O., Gabriele P., Miller K., Ott L., Skulina K., Tilley R., Viada T. Tabletop X-ray microscope using 8keV zone plates. Optical Engineering 1990, 29:576-580.
27. Bionta R., Skulina K., Weinberg J. Hard X-ray sputtered-sliced phase zone plates. Applied Physics Letters 1994, 64:945-947.
28. Yasumoto M., Tamura S., Kamijo N., Suzuki Y., Awaji M., et al. Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit. Japanese Journal of Applied Physics Part 1 - Regular Papers short Notes & Review Papers 2001, 40:4747-4748.
29. Tamura S., Yasumoto M., Kamijo N., Suzuki Y., Awaji M., et al. New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays. Vacuum 2006, 80:823-827.
30. Tamura S., Yasumoto M., Kamijo N., Takeuchi A., Uesugi K., Suzuki Y. Multilevel-type multilayer X-ray lens (Fresnel zone plate) by sputter deposition. Vacuum 2008, 83:691-694.
31. Tamura S., Yasumoto M., Kamijo N., Takeuchi A., Uesugi K., Terada Y., Suzuki Y. Fabrication and testing of sputtered-sliced kinoform style Fresnel zone plate. Vacuum 2010, 84:1457-1459. (Tenth International Symposium on Sputtering and Plasma Processes, Kanazawa, Japan, July 08-10, 2009).
32. Tamura S., Yasumoto M., Kamijo N., Suzuki Y., Awaji M., Takeuchi A. Novel application of sputtered-sliced concentric multilayers to various optical elements for synchrotron radiation high-brilliance X-ray beamlines at Spring-8. Vacuum 2004, 74:741-746.
33. Suzuki Y., Kamijo N., Tamura S., Handa K., Takeuchi A., et al. Hard X-ray microbeam experiment at the Tristan main ring test beamline of the KEK. Journal of Synchrotron Radiation 1997, 4:60-63.
34. Golant K., Lavrishchev S., Popov A., Artyukov I., Feshchenko R., et al. Fabrication of X-ray zone plates by surface-plasma chemical vapour deposition. Applied Optics-OT 2007, 46:5964-5966.
35. Artyukov I., Bukreeva I., Chernov V., Feshchenko R., Golant K., et al. Zone plates for hard X-rays fabricated with the SPCVD technology. Nuclear Instruments & Methods in Physics Research Section A, Accelerators, Spectrometers, Detectors and Associated Equipment 2009, 603:66-68.
36. Vladimirsky Y., Koops H. Moire method and zone plate pattern inaccuracies. Journal of Vacuum Science & Technology B 1988, 6:2142-2146.
37. B. Kaulich, Phase zone plates for hard X-ray microscopy, in: I. McNulty (Ed.), X-ray Microfocusing: Applications and Techniques, Proceedings of the Society of Photo-optical Instrumentation Engineers SPIE 3449 (1998) 108-117.
38. Szeghalmi A., Senz S., Bretschneider M., Goesele U., Knez M. All dielectric hard X-ray mirror by atomic layer deposition. Applied Physics Letters 2009, 94.
39. Yun W., Viccaro P., Lai B., Chrzas J. Coherent hard X-ray focusing optics and applications. Review of Scientific Instrument 1992, 63:582.
40. Maser J., Schmahl G. Coupled wave description of the diffraction by zone plates with high aspect ratios. Optics Communications 1992, 89:355-362.
41. 2 at room temperature with the use of catalyzed sequential half-reactions. Science 1997, 278:1934-1936.
42. 3-catalyzed sequential surface reactions. Surface Science 2000, 447:81-90.
43. 3 as the catalyst. Journal of the Electrochemical Society 2004, 151:G528-G535.
44. Hausmann D., Becker J., Wang S., Gordon R. Rapid vapor deposition of highly conformal silica nanolaminates. Science 2002, 298:402-406.
45. Bachmann J., Zierold R., Chong Y., Hauert R., Sturm C., Schmidt-Grund R. A practical, self-catalytic, atomic layer deposition of silicon dioxide. Angewandte Chemie-International Edition in English 2008, 47:6177-6179.
46. Leskela M., Ritala M. Atomic layer deposition (ALD): from precursors to thin film structures. Thin Solid Films 2002, 409:138-146.
47. Follath R., Schmidt J., Weigand M., Fauth K. The X-ray microscopy beamline UE46-PGM2 at BESSY. AIP Conference Proceedings 2010, 323-326.
48. Poodt P., Lankhorst A., Roozeboom F., Spee K., Maas D., Vermeer A. High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation. Advanced Materials 2010, 22:3564-3567.
49. Nygard K., Gorelick S., Vila-Comamala J., Farm E., Bergamaschi A., et al. Beam-induced damage on diffractive hard X-ray optics. Journal of Synchrotron Radiation 2010, 17:786-790.