Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition

Applied Optics

Volumn 46, Issue 23, 2007, Pages 5964-5966

  Golant, K M ^a   Lavrishchev, S V ^a   Popov, A V ^b   Artyukov, I A ^c   Feshchenko, R M ^c   Mitrofanov, A N ^c   Vinogradov, A V ^c  

^a FIBER OPTICS RESEARCH CENTER   (Russian Federation)

^b PUSHKOV INSTITUTE OF TERRESTRIAL MAGNETISM   (Russian Federation)

^c LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DIFFRACTION EFFICIENCY; FABRICATION; MULTILAYERS; SPUTTERING;

FRESNEL ZONE PLATES; MULTILAYER STRUCTURES; PLASMA CHEMICAL PROCESSES; X-RAY ZONE PLATES;

SURFACE PLASMON RESONANCE;

EID: 35948988893     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.005964     Document Type: Article

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