Suppression of corrugated boundaries in multilayer Fresnel zone plate for hard X-ray synchrotron radiation using cylindrical slit

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 7, 2001, Pages 4747-4748

  Yasumoto, Masato ^a,b   Tamura, Shigeharu ^a,b   Kamijo, Nagao ^b,c   Suzuki, Yoshio ^b   Awaji, Mitsuhiro ^b   Takeuchi, Akihisa ^b   Takano, Hidekazu ^b   Kohmura, Yoshiki ^d   Handa, Katsumi ^e  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^c KANSAI MEDICAL UNIVERSITY   (Japan)

^d RIKEN HARIMA INSTITUTE   (Japan)

^e RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Columnar structure; Cylindrical slit; Focused ion beam (FIB); Fresnel zone plate; Hard X ray; Magnetron sputtering; Scanning ion microscope (SIM); Synchrotron radiation; Void

Indexed keywords

CYLINDERS (SHAPES); ION BEAMS; MAGNETRON SPUTTERING; SYNCHROTRON RADIATION; X RAY ANALYSIS;

SCANNING ION MICROSCOPY (SIM);

MULTILAYERS;

EID: 0035388535     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.4747     Document Type: Article

References (8)