Multilevel-type multilayer X-ray lens (Fresnel zone plate) by sputter deposition

Vacuum

Volumn 83, Issue 3, 2008, Pages 691-694

  Tamura, Shigeharu ^a,c   Yasumoto, Masato ^a,c   Kamijo, Nagao ^b,c   Takeuchi, Akihisa ^c   Uesugi, Kentaro ^c   Suzuki, Yoshio ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b KANSAI MEDICAL UNIVERSITY   (Japan)

^c JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

Diffraction efficiency; Multilayer zone plate; Sputtering; X ray; Zone plate

Indexed keywords

DIFFRACTION; DIFFRACTION EFFICIENCY; IMAGE RESOLUTION; LENSES; MULTILAYERS; OPTICAL INSTRUMENT LENSES; OPTICAL INSTRUMENTS; OPTICAL SYSTEMS; PLATES (STRUCTURAL COMPONENTS); SPUTTER DEPOSITION; X RAY APPARATUS;

MULTILAYER ZONE PLATE; SPUTTERING; X-RAY; ZONE PLATE;

ELECTROMAGNETIC WAVES;

EID: 53149123243     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.046     Document Type: Article

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