Synchrotron radiation photoemission study of Ge3N4/Ge structures formed by plasma nitridation

Japanese Journal of Applied Physics

Volumn 50, Issue 10 PART 2, 2011, Pages

  Hosoi, Takuji ^a   Kutsuki, Katsuhiro ^a   Okamoto, Gaku ^a   Yoshigoe, Akitaka ^b   Teraoka, Yuden ^b   Shimura, Takayoshi ^a   Watanabe, Heiji ^a  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDING STATE; CORE-LEVEL SHIFT; CORE-LEVEL SPECTRA; DECOMPOSITION TEMPERATURE; ENERGY BANDGAPS; ENERGY-BAND ALIGNMENT; ENERGY-LOSS SPECTRUM; GE SUBSTRATES; GE(100) SURFACE; HIGH DENSITY PLASMAS; IN-SITU; OXIDIZED SURFACES; PEAK POSITION; PEAK-DECONVOLUTION; PLASMA NITRIDATION; SYNCHROTRON RADIATION PHOTOEMISSION; SYNCHROTRON RADIATION PHOTOEMISSION SPECTROSCOPY; THERMAL-ANNEALING; VALENCE BAND OFFSETS; VALENCE BAND SPECTRA;

ALIGNMENT; BAND STRUCTURE; CHEMICAL BONDS; EMISSION SPECTROSCOPY; ENERGY DISSIPATION; NITRIDES; PHOTOELECTRON SPECTROSCOPY; PHOTOEMISSION; PYROLYSIS; SYNCHROTRON RADIATION; SYNCHROTRONS;

GERMANIUM;

EID: 80054878702     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.10PE03     Document Type: Article

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