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Volumn 258, Issue 2, 2011, Pages 791-799

Influence of temperature on structure as well as adhesion and friction and wear behavior of hydrogenated carbon nitride films prepared on silicon substrate

(5) Guo, Jianhui a Zhang, Jingwei a Zhao, Chuang a Zhang, Jiwei a Zhang, Zhijun a

a HENAN UNIVERSITY (China)

Author keywords

Adhesion; Friction and wear behavior; Silicon substrate; Structure; Temperature

Indexed keywords

ADHESION; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; CARBON NITRIDE; FRICTION; HYDROGENATION; NANOCRYSTALS; NITRIDES; SILICON; STRUCTURE (COMPOSITION); SUBSTRATES; TEMPERATURE; TRIBOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE;

ADHESION TO SUBSTRATE; DEPOSITION TEMPERATURES; FRICTION AND WEAR BEHAVIORS; FRICTION COEFFICIENTS; HYDROGENATED CARBON; SILICON SUBSTRATES; STEEL COUNTERPART; TEMPERATURE RANGE;

FILM PREPARATION;

EID: 80054039440 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.08.098 Document Type: Article

Times cited : (8)

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