Comparative study on the bonding structure of hydrogenated and hydrogen free carbon nitride films with high N content

Diamond and Related Materials

Volumn 9, Issue 3-6, 2000, Pages 577-581

  Hammer, P ^a   Lacerda, R G ^a   Droppa Jr , R ^a   Alvarez, F ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Azaadenine precursor; Carbides and nitrides; CN(x); H films; Structural analysis

Indexed keywords

ARGON; AROMATIC COMPOUNDS; CHEMICAL BONDS; FILM GROWTH; GRAPHITE; HYDROGEN; HYDROGENATION; MOLECULAR STRUCTURE; NITRIDES; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

AZAADENINE; CARBON NITRIDE; ION BEAM ASSISTED SPUTTERING METHOD;

CARBON INORGANIC COMPOUNDS;

CARBON NITRIDE; STRUCTURAL ANALYSIS;

EID: 0034047728     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00300-3     Document Type: Conference Paper

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