Properties of carbon nitride films deposited by magnetron sputtering

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 56-61

  Kusano, Y ^a   Evetts, J E ^a   Somekh, R E ^a   Hutchings, I M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Carbon nitride; Friction coefficient; Magnetron sputtering FTIR

Indexed keywords

CARBON INORGANIC COMPOUNDS; CERAMIC COATINGS; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FRICTION; MAGNETRON SPUTTERING; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; THIN FILMS; WEAR RESISTANCE;

CARBON NITRIDE; FRICTION COEFFICIENT;

PROTECTIVE COATINGS;

EID: 0032476356     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00983-3     Document Type: Article

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