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Volumn 482, Issue 1-2, 2005, Pages 156-166

Comparative study of the structure of a-CNx and a-CN x:H films using NEXAFS, XPS and FT-IR analysis

Author keywords

Amorphous carbon; Carbon nitride; FT IR; NEXAFS; Thin films; XPS

Indexed keywords

CARBON NITRIDE; CHEMICAL BONDS; COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; MAGNETRON SPUTTERING; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 17744381799     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.134     Document Type: Conference Paper
Times cited : (35)

References (35)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.