SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 110, Issue 6, 2011, Pages

Bonded hydrogen in nanocrystalline silicon photovoltaic materials: Impact on structure and defect density

(4) Xu, L a Li, Z P a Wen, C a Shen, W Z a

a SHANGHAI JIAO TONG UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS TISSUES; BONDED HYDROGEN; BOUNDARY SURFACES; GRAIN BOUNDARY STRUCTURE; GROWTH MECHANISMS; HYDROGENATED NANOCRYSTALLINE SILICON (NC-SI:H); MICROSTRUCTURAL PROPERTIES; NC-SI:H; OPTICAL INVESTIGATION; PHYSICALLY BASED; PLATELET-LIKE CONFIGURATIONS; POST-DEPOSITION; SMALL-CRYSTALLINE;

AMORPHOUS FILMS; AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; DANGLING BONDS; DEFECT DENSITY; DEFECTS; DEPOSITION; ELECTRON SPIN RESONANCE SPECTROSCOPY; GRAIN BOUNDARIES; HYDROGEN; INFRARED SPECTROSCOPY; MAGNETIC MOMENTS; NANOCRYSTALLINE SILICON; PASSIVATION; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; TISSUE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 80053505076 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3638712 Document Type: Article

Times cited : (28)

References (43)

1
- 36449000450
- 10.1063/1.356432
- Y. L. He, C. Z. Yin, G. X. Cheng, L. C. Wang, X. N. Liu, and G. Y. Hu, J. Appl. Phys. 75, 797 (1994). 10.1063/1.356432
- (1994) J. Appl. Phys. , vol.75 , pp. 797
- He, Y.L.¹ Yin, C.Z.² Cheng, G.X.³ Wang, L.C.⁴ Liu, X.N.⁵ Hu, G.Y.⁶

2
- 22944491123
- 10.1016/j.tsf.2005.01.058
- J. Yang, B. Yan, and S. Guha, Thin Solid Films 487, 162 (2005). 10.1016/j.tsf.2005.01.058
- (2005) Thin Solid Films , vol.487 , pp. 162
- Yang, J.¹ Yan, B.² Guha, S.³

3
- 32644432656
- 10.1088/0957-4484/17/2/042
- X. Y. Chen, W. Z. Shen, H. Chen, R. Zhang, and Y. L. He, Nanotechnology 17, 595 (2006). 10.1088/0957-4484/17/2/042
- (2006) Nanotechnology , vol.17 , pp. 595
- Chen, X.Y.¹ Shen, W.Z.² Chen, H.³ Zhang, R.⁴ He, Y.L.⁵

4
- 19944434358
- 10.1063/1.1832752
- X. Y. Chen, W. Z. Shen, and Y. L. He, J. Appl. Phys. 97, 024305 (2005). 10.1063/1.1832752
- (2005) J. Appl. Phys. , vol.97 , pp. 024305
- Chen, X.Y.¹ Shen, W.Z.² He, Y.L.³

5
- 33845191486
- 10.1063/1.2388042
- R. Zhang, X. Y. Chen, K. Zhang, and W. Z. Shen, J. Appl. Phys. 100, 104310 (2006). 10.1063/1.2388042
- (2006) J. Appl. Phys. , vol.100 , pp. 104310
- Zhang, R.¹ Chen, X.Y.² Zhang, K.³ Shen, W.Z.⁴

6
- 47249132797
- 10.1016/j.solmat.2008.04.012
- A. M. Funde, N. A. Bakr, D. K. Kamble, R. R. Hawaldar, D. P. Amalnerkar, and S. R. Jadkar, Sol. Energy Mater. Sol. Cells 92, 1217 (2008). 10.1016/j.solmat.2008.04.012
- (2008) Sol. Energy Mater. Sol. Cells , vol.92 , pp. 1217
- Funde, A.M.¹ Bakr, N.A.² Kamble, D.K.³ Hawaldar, R.R.⁴ Amalnerkar, D.P.⁵ Jadkar, S.R.⁶

7
- 0037429946
- 10.1063/1.1559657
- A. H. M. Smets, W. M. M. Kessels, and M. C. M. van de Sanden, Appl. Phys. Lett. 82, 1547 (2003). 10.1063/1.1559657
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1547
- Smets, A.H.M.¹ Kessels, W.M.M.² Van De Sanden, M.C.M.³

8
- 0032359986
- 10.1116/1.581520
- D. C. Marra, E. A. Edelberg, R. L. Naone, and E. S. Aydil, J. Vac. Sci. Technol. A 16, 3199 (1998). 10.1116/1.581520
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3199
- Marra, D.C.¹ Edelberg, E.A.² Naone, R.L.³ Aydil, E.S.⁴

9
- 0032109123
- 10.1063/1.368082
- A. V. Keudell and J. R. Abelson, J. Appl. Phys. 84, 489 (1998). 10.1063/1.368082
- (1998) J. Appl. Phys. , vol.84 , pp. 489
- Keudell, A.V.¹ Abelson, J.R.²

10
- 13244278248
- 10.1116/1.1824191
- S. Agarwal, B. Hoex, M. C. M. van de Sanden, D. Maroudas, and E. S. Aydil, J. Vac. Sci. Technol. B 22, 2719 (2004). 10.1116/1.1824191
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2719
- Agarwal, S.¹ Hoex, B.² Van De Sanden, M.C.M.³ Maroudas, D.⁴ Aydil, E.S.⁵

11
- 0142260940
- 10.1049/ip-cds:20030636
- F. Finger, R. Carius, T. Dylla, S. Klein, S. Okur, and M. Gnes, IEE Proc.: Circuits Devices Syst. 150, 4 (2003). 10.1049/ip-cds:20030636
- (2003) IEE Proc.: Circuits Devices Syst. , vol.150 , pp. 4
- Finger, F.¹ Carius, R.² Dylla, T.³ Klein, S.⁴ Okur, S.⁵ Gnes, M.⁶

12
- 33748444007
- 10.1016/j.solmat.2006.06.019
- T. Matsui, A. Matsuda, and M. Kondo, Sol. Energy Mater. Sol. Cells 90, 3199 (2006). 10.1016/j.solmat.2006.06.019
- (2006) Sol. Energy Mater. Sol. Cells , vol.90 , pp. 3199
- Matsui, T.¹ Matsuda, A.² Kondo, M.³

13
- 78650747071
- 10.1063/1.3528205
- P. G. Hugger, J. D. Cohen, B. J. Yan, G. Z. Yue, J. Yang, and S. Guha, Appl. Phys. Lett. 97, 252103 (2010). 10.1063/1.3528205
- (2010) Appl. Phys. Lett. , vol.97 , pp. 252103
- Hugger, P.G.¹ Cohen, J.D.² Yan, B.J.³ Yue, G.Z.⁴ Yang, J.⁵ Guha, S.⁶

14
- 0028368232
- 10.1063/1.355808
- M. Yang, D. M. Huang, P. H. Hao, F. L. Zhang, X. Y. Hou, and X. Wang, J. Appl. Phys. 75, 651 (1994). 10.1063/1.355808
- (1994) J. Appl. Phys. , vol.75 , pp. 651
- Yang, M.¹ Huang, D.M.² Hao, P.H.³ Zhang, F.L.⁴ Hou, X.Y.⁵ Wang, X.⁶

15
- 36549104969
- 10.1063/1.99054
- E. Bustarret, M. A. Hachicha, and M. Brunel, Appl. Phys. Lett. 52, 1675 (1988). 10.1063/1.99054
- (1988) Appl. Phys. Lett. , vol.52 , pp. 1675
- Bustarret, E.¹ Hachicha, M.A.² Brunel, M.³

16
- 0000157232
- 10.1103/PhysRevB.44.2452
- M. R. Fitzsimmons, J. A. Eastman, M. Mller-Stach, and G. Wallner, Phys. Rev. B 44, 2452 (1991). 10.1103/PhysRevB.44.2452
- (1991) Phys. Rev. B , vol.44 , pp. 2452
- Fitzsimmons, M.R.¹ Eastman, J.A.² Mller-Stach, M.³ Wallner, G.⁴

17
- 0242580938
- 10.1016/j.jcrysgro.2003.08.048
- H. Chen, M. H. Gullanar, and W. Z. Shen, J. Cryst. Growth 260, 91 (2004). 10.1016/j.jcrysgro.2003.08.048
- (2004) J. Cryst. Growth , vol.260 , pp. 91
- Chen, H.¹ Gullanar, M.H.² Shen, W.Z.³

18
- 0014606353
- 10.1103/PhysRevLett.23.1167
- S. C. Moss and J. F. Graczyk, Phys. Rev. Lett. 23, 1167 (1969). 10.1103/PhysRevLett.23.1167
- (1969) Phys. Rev. Lett. , vol.23 , pp. 1167
- Moss, S.C.¹ Graczyk, J.F.²

19
- 0035542228
- 10.3938/jkps.39.30
- H. C. Lee, S. I. Lee, H. Lee, S. H. Choi, J. I. Ryu, and J. Jang, J. Korean Phys. Soc. 39, S30 (2001). 10.3938/jkps.39.30.
- (2001) J. Korean Phys. Soc. , vol.39 , pp. 30
- Lee, H.C.¹ Lee, S.I.² Lee, H.³ Choi, S.H.⁴ Ryu, J.I.⁵ Jang, J.⁶

20
- 0000389489
- 10.1002/andv416:7
- D. A. G. Bruggeman, Ann. Phys. 24, 636 (1935). 10.1002/andp.v416:7
- (1935) Ann. Phys. , vol.24 , pp. 636
- Bruggeman, D.A.G.¹

21
- 40949103134
- 10.1016/j.apsusc.2007.10.069
- J. Mullerova, P. Sutta, G. Vanelzakker, M. Zeman, and M. Mikula, Appl. Surf. Sci. 254, 3690 (2008). 10.1016/j.apsusc.2007.10.069
- (2008) Appl. Surf. Sci. , vol.254 , pp. 3690
- Mullerova, J.¹ Sutta, P.² Vanelzakker, G.³ Zeman, M.⁴ Mikula, M.⁵

22
- 0002139241
- 10.1016/S0040-6090(98)01165-1
- A. Matsuda, Thin Solid Films 337, 1 (1999). 10.1016/S0040-6090(98)01165-1
- (1999) Thin Solid Films , vol.337 , pp. 1
- Matsuda, A.¹

23
- 0037019294
- 10.1038/nature00866
- S. Sriraman, S. Agarwal, E. S. Aydil, and D. Maroudas, Nature 418, 62 (2002). 10.1038/nature00866
- (2002) Nature , vol.418 , pp. 62
- Sriraman, S.¹ Agarwal, S.² Aydil, E.S.³ Maroudas, D.⁴

24
- 33748915067
- 10.1063/1.2229426
- S. Sriraman, S. Agarwal, E. S. Aydil, and D. Maroudas, J. Appl. Phys. 100, 053514 (2006). 10.1063/1.2229426
- (2006) J. Appl. Phys. , vol.100 , pp. 053514
- Sriraman, S.¹ Agarwal, S.² Aydil, E.S.³ Maroudas, D.⁴

25
- 0035576332
- 10.1063/1.1413241
- E. Amanatides, S. Stamou, and D. Mataras, J. Appl. Phys. 90, 5786 (2001). 10.1063/1.1413241
- (2001) J. Appl. Phys. , vol.90 , pp. 5786
- Amanatides, E.¹ Stamou, S.² Mataras, D.³

26
- 0035890350
- 10.1063/1.1407317
- A. H. Mahan, Y. Xu, D. L. Williamson, W. Beyer, J. K. Perkins, M. Vanecek, L. M. Gedvilas, and B. P. Nelson, J. Appl. Phys. 90, 5038 (2001). 10.1063/1.1407317
- (2001) J. Appl. Phys. , vol.90 , pp. 5038
- Mahan, A.H.¹ Xu, Y.² Williamson, D.L.³ Beyer, W.⁴ Perkins, J.K.⁵ Vanecek, M.⁶ Gedvilas, L.M.⁷ Nelson, B.P.⁸

27
- 0000182211
- 10.1063/1.372226
- J. Robertson, J. Appl. Phys. 87, 2608 (2000). 10.1063/1.372226
- (2000) J. Appl. Phys. , vol.87 , pp. 2608
- Robertson, J.¹

28
- 0001587036
- 10.1063/1.354216
- S. C. Saha, A. K. Barus, and S. Ray, J. Appl. Phys. 74, 5561 (1993). 10.1063/1.354216
- (1993) J. Appl. Phys. , vol.74 , pp. 5561
- Saha, S.C.¹ Barus, A.K.² Ray, S.³

29
- 33745935178
- 10.1103/PhysRevB.16.3556
- M. H. Brodsky, M. Cardona, and J. J. Cuomo, Phys. Rev. B 16, 3556 (1977). 10.1103/PhysRevB.16.3556
- (1977) Phys. Rev. B , vol.16 , pp. 3556
- Brodsky, M.H.¹ Cardona, M.² Cuomo, J.J.³

30
- 0001383858
- R. J. Nemanich, and, 10.1103/PhysRevB.18.4288
- G. Lucovsky, R. J. Nemanich, and J. C. Knights, Phys. Rev. B 19, 2064 (1979). 10.1103/PhysRevB.18.4288
- (1979) Phys. Rev. B , vol.19 , pp. 2064
- Lucovsky, G.¹ Knights, J.C.²

31
- 0001010127
- 10.1103/PhysRevB.40.1795
- E. C. Freeman, and W. Paul, Phys. Rev. B 18, 4288 (1978). 10.1103/PhysRevB.40.1795
- (1978) Phys. Rev. B , vol.18 , pp. 4288
- Freeman, E.C.¹ Paul, W.²

32
- 0001382365
- 10.1103/PhysRevB.16.3556
- D. V. Tsu, G. Lucovsky, and B. N. Davidson, Phys. Rev. B 40, 1795 (1989). 10.1103/PhysRevB.16.3556
- (1989) Phys. Rev. B , vol.40 , pp. 1795
- Tsu, D.V.¹ Lucovsky, G.² Davidson, B.N.³

33
- 0000671779
- 10.1063/1.363541
- U. Kroll, J. Meier, A. Shah, S. Mikhailov, and J. Weber, J. Appl. Phys. 80, 4971 (1996). 10.1063/1.363541
- (1996) J. Appl. Phys. , vol.80 , pp. 4971
- Kroll, U.¹ Meier, J.² Shah, A.³ Mikhailov, S.⁴ Weber, J.⁵

34
- 0000737116
- 10.1103/PhysRevB.45.13367
- A. A. Langford, M. L. Fleet, B. P. Nelson, W. A. Lanford, and N. Maley, Phys. Rev. B 45, 13367 (1992). 10.1103/PhysRevB.45.13367
- (1992) Phys. Rev. B , vol.45 , pp. 13367
- Langford, A.A.¹ Fleet, M.L.² Nelson, B.P.³ Lanford, W.A.⁴ Maley, N.⁵

35
- 80053506991
- J. Koka, H. Stuchlkova, M. Ledinska, J. Stuchlka, T. Matesa, and A. Fejfar, Sol. Energy Mater. Sol. Cells 66, 1444 (2009).
- (2009) Sol. Energy Mater. Sol. Cells , vol.66 , pp. 1444
- Koka, J.¹ Stuchlkova, H.² Ledinska, M.³ Stuchlka, J.⁴ Matesa, T.⁵ Fejfar, A.⁶

36
- 34548083071
- 10.1103/PhysRevB.76.073202
- A. H. M. Smets and M. C. M. van de Sanden, Phys. Rev. B 76, 073202 (2007). 10.1103/PhysRevB.76.073202
- (2007) Phys. Rev. B , vol.76 , pp. 073202
- Smets, A.H.M.¹ Van De Sanden, M.C.M.²

37
- 36449001216
- 10.1063/1.357627
- M. Niwano, J. Kageyama, K. Kurita, K. Kinashi, I. Takahashi, and N. Miyamoto, J. Appl. Phys. 76, 2157 (1994). 10.1063/1.357627
- (1994) J. Appl. Phys. , vol.76 , pp. 2157
- Niwano, M.¹ Kageyama, J.² Kurita, K.³ Kinashi, K.⁴ Takahashi, I.⁵ Miyamoto, N.⁶

38
- 0036820252
- 10.1016/S1359-0286(02)00113-4
- M. Kondo and A. Matsuda, Curr. Opin. Solid State Mater. Sci. 6, 445 (2002). 10.1016/S1359-0286(02)00113-4
- (2002) Curr. Opin. Solid State Mater. Sci. , vol.6 , pp. 445
- Kondo, M.¹ Matsuda, A.²

39
- 33748910275
- 10.1063/1.2229429
- M. S. Valipa, S. Sriraman, E. S. Aydil, and D. Maroudas, J. Appl. Phys. 100, 053515 (2006). 10.1063/1.2229429
- (2006) J. Appl. Phys. , vol.100 , pp. 053515
- Valipa, M.S.¹ Sriraman, S.² Aydil, E.S.³ Maroudas, D.⁴

40
- 0034664601
- 10.1103/PhysRevB.62.8012
- N. H. Nickel, G. B. Anderson, N. M. Johnson, and J. Walker, Phys. Rev. B 62, 8012 (2000). 10.1103/PhysRevB.62.8012
- (2000) Phys. Rev. B , vol.62 , pp. 8012
- Nickel, N.H.¹ Anderson, G.B.² Johnson, N.M.³ Walker, J.⁴

41
- 0242636520
- 10.1088/0953-8984/15/43/004
- S. Vignoli, R. Butté, R. Meaudre, M. Meaudre, and R. Brenier, J. Phys.: Condens. Matter 15, 7185 (2003). 10.1088/0953-8984/15/43/004
- (2003) J. Phys.: Condens. Matter , vol.15 , pp. 7185
- Vignoli, S.¹ Butté, R.² Meaudre, R.³ Meaudre, M.⁴ Brenier, R.⁵

42
- 0038446365
- 10.1016/S0927-0248(02)00450-6
- K. Lips, P. Kanschat, and W. Fuhs, Sol. Energy Mater. Sol. Cells 78, 513 (2003). 10.1016/S0927-0248(02)00450-6
- (2003) Sol. Energy Mater. Sol. Cells , vol.78 , pp. 513
- Lips, K.¹ Kanschat, P.² Fuhs, W.³

43
- 0000861103
- 10.1103/PhysRevB.50.18046
- C. Manfredotti, F. Fizzotti, M. Boero, P. Pastorino, P. Polesello, and E. Vittone, Phys. Rev. B 50, 18046 (1994). 10.1103/PhysRevB.50.18046
- (1994) Phys. Rev. B , vol.50 , pp. 18046
- Manfredotti, C.¹ Fizzotti, F.² Boero, M.³ Pastorino, P.⁴ Polesello, P.⁵ Vittone, E.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.