Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

Applied Surface Science

Volumn 254, Issue 12, 2008, Pages 3690-3695

  Mullerova J ^a   Sutta P ^b   van Elzakker, G ^c   Zeman, M ^c   Mikula, M ^d  

^a UNIVERSITY OF ILINA   (Slovakia)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

Amorphous phase; Hydrogen; Microcrystalline phase; Thin film silicon

Indexed keywords

HYDROGEN; HYDROGENATION; MICROCRYSTALLINE SILICON; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILANES;

AMORPHOUS PHASES; MICROCRYSTALLINE PHASES; SILICON THIN FILMS;

THIN FILMS;

EID: 40949103134     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.069     Document Type: Article

References (32)

1. Koval R.C., et al. Appl. Phys. Lett. 75 (1999) 1553
2. Vetterl O., Finger F., Carius R., Hapke P., Houben L., Kluth O., Lambertz A., Mück A., Rech B., and Wagner H. Sol. Energy Mater. Sol. Cells 62 (2000) 97
3. Ristova M., Kuo Y., and Lee H.H. Appl. Surf. Sci. 218 (2003) 44
4. Mahan A.H., Biswas R., Gedvilas L.M., Williamson D.L., and Pan B.C. J. Appl. Phys. 96 (2004) 3818
5. Zhang S., Liao X., Xu Y., Martins R., Fortunato E., and Kong G. J. Non-Cryst. Solids 338-340 (2004) 188
6. Vallat-Sauvain E., Kroll U., Meier J., Wyrsch N., and Shah A. J. Non-Cryst. Solids 266-269 (2000) 125
7. Fontcuberta i Morral A., Roca i Cabarrocas P., and Clerc C. Phys. Rev. B 69 (2004) 125307
8. Collins R.W., Ferlauto A.S., Ferreira G.M., Chen C., Koh J., Koval R.J., Lee Y., Pearce J.M., and Wronski C.R. Sol. Energy Mater. Sol. Cells 78 (2003) 143
9. Orpella A., Voz C., Puigdollers J., Dosev D., Fonrodona M., Soler D., Bertomeu J., Asensi J.M., Andreu J., and Alcubilla R. Thin Solid Films 395 (2001) 335
10. Sriraman S., Agarwal S., Aydil E.S., and Maroudas D. Nature 418 (2002) 62
11. Tsu D.V., Chao S.B., Ovshinsky S.R., Guha S., and Yang J. Appl. Phys. Lett. 71 (1997) 1317
12. Kroll U., Meier J., Shah A., Mikhailov S., and Weber J. J. Appl. Phys. 80 (1996) 4971
13. Müllerová J., Jurečka S., and Šutta P. Sol. Energy 80 (2006) 678
14. Müllerová J., Jurečka S., Šutta P., and Mikula M. Acta Phys. Slovaca 55 (2005) 351
15. van Elzakker G., Nádaždy V., Tichelaar F.D., Metselaar J.W., and Zeman M. Thin Solid Films 511-512 (2006) 252
16. Bruggeman D.A.G. Ann. Phys. 24 (1935) 636
17. Lee H.C., Lee S.I., Lee H., Choi S.H., Ryu J.I., and Jang J. J. Korean Phys. Soc. 39 (2001) S30
18. Mui K., Basa D.K., and Smith F.W. Phys. Rev. B 35 (1987) 8089
19. Smets A.H.M., Kessels W.M.M., and van den Sanden M.C.M. Appl. Phys. Lett. 82 (2003) 1547
20. Ziegler Y., Daudrix V., Droz C., Platz R., Wyrsch N., and Shah A. Sol. Energy Mater. Sol. Cells 66 (2001) 413
21. Stannowski B., and Schropp R.E.I. Thin Solid Films 383 (2001) 125
22. Manfredotti C., Fizzotti F., Boero M., Pastorino P., Polesello P., and Vittone E. Phys. Rev. B50 (1994) 18046
23. Oewens J.D., and Schropp R.E.I. Phys. Rev. B54 (1996) 17759
24. Beyer W., and Abo Ghazala M.S. Mater. Res. Soc. Symp. Proc. 507 (1998) 601
25. Cardona M. Phys. Stat. Solidi B 118 (1983) 463
26. Gracin D., Juraic K., and Bogdanovic-Radovic I. Vacuum 80 (2005) 146
27. von Keudell A., and Abelson J.R. J. Appl. Phys. 84 (1998) 489
28. Langford A.A., Fleet L.M., Nelson B.P., Lanford W.A., and Maley N. Phys. Rev. B 45 (1992) 13367
29. Remeš Z., Vaněček M., Mahan A.H., and Crandall R.S. Phys. Rev. B 56 (1997) R12710
30. Remeš Z., Vaněček M., Torres P., Kroll U., Mahan A.H., and Crandall R.S. J. Non-Cryst. Solids 227 (1998) 876
31. Mahan: A.H. In: Searle T. (Ed). Properties of Amorphous Silicon and its Alloys (1998), Inspec, London
32. Baugh J., and Han D. Phys. Rev. B 66 (2002) 115203